Closure or lock device for a vacuum chamber
AssigneeApplied Materials, Inc.
InventorsUlrich OLDENDORF, Christof KLESEN
Life of this patent
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Abstract
Closure device or lock device for a vacuum chamber comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate, at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.
Claims20
Closure device or lock device for a vacuum chamber, comprising
- a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber,
- a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate;
- at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.
Dependencies are inferred from the claim text.