# US 2018/0324369 A1 · Solid-state image pickup device, manufacturing method therefor, and electronic apparatus

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- Number: US 2018/0324369 A1
- Document ID: US20180324369A1
- Status: Published application
- Kind: A1
- Application number: 15/773,835
- Filed: 2016-11-04
- Published: 2018-11-08
- Earliest claimed: 2015-11-18
- Assignees: Sony Semiconductor Solutions Corporation
- Applicants: Sony Semiconductor Solutions Corporation
- Inventors: Kenichi MURATA
- Web page: https://patentgrep.com/patent/US20180324369A1

## CPC

- H04N 25/48: Increasing resolution by shifting the sensor relative to the scene
- H10F 39/014: {of CMOS image sensors}
- H10F 39/12: Image sensors
- H10F 39/18: Complementary metal-oxide-semiconductor [CMOS] image sensors; Photodiode array image sensors
- H10F 39/191: {Photoconductor image sensors}
- H10F 39/8033: {Photosensitive area}
- H10F 39/8037: {the integrated elements comprising a transistor}
- H10F 39/807: {Pixel isolation structures}
- H10K 39/32: Organic image sensors
- H10F 39/8063: {Microlenses}
- H04N: PICTORIAL COMMUNICATION, e.g. TELEVISION
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10K: ORGANIC ELECTRIC SOLID-STATE DEVICES

## Abstract

The present disclosure relates to a solid-state image pickup device, a manufacturing method therefor, and an electronic apparatus that further miniaturization of a solid-state image pickup device to be achieved. A lower electrode is provided in each of pixels so as to hold a photoelectric conversion film including an organic material between the lower electrode and an upper electrode, and an isolation region is disposed to isolate the lower electrodes of the pixels from each other and includes at least a fixed charge film. The isolation region is formed by the fixed charge film that is formed more deeply than the thickness of the lower electrode. The present technology is, for example, applicable to a solid-state image pickup device having an organic photoelectric conversion film.

## Claims

### Claim 1

A solid-state image pickup device comprising:
a lower electrode provided in each of pixels so as to hold a photoelectric conversion film including an organic material between the lower electrode and an upper electrode; and
an isolation region disposed so as to isolate the lower electrodes of the pixels from each other and including at least a fixed charge film having a fixed charge.

### Claim 2 (depends on 1)

The solid-state image pickup device according to claim 1, wherein the isolation region is formed by the fixed charge film that is formed more deeply than a thickness of the lower electrode.

### Claim 3 (depends on 1)

The solid-state image pickup device according to claim 1, wherein the isolation region is formed by a laminated structure including the fixed charge film that is formed more shallowly than the thickness of the lower electrode so as to be in contact with the photoelectric conversion film and an insulating film that is formed more deeply than the thickness of the lower electrode on a lower layer side of the fixed charge film.

### Claim 4 (depends on 1)

The solid-state image pickup device according to claim 1, wherein
in the solid-state image pickup device, a hole reading system is adopted, and
the fixed charge film has a positive fixed charge.

### Claim 5 (depends on 1)

The solid-state image pickup device according to claim 1, wherein
in the solid-state image pickup device, an electron reading system is adopted, and
the fixed charge film has a negative fixed charge.

### Claim 6

A method for manufacturing a solid-state image pickup device, comprising the steps of:
forming a lower electrode provided in each of pixels so as to hold a photoelectric conversion film including an organic material between the lower electrode and an upper electrode; and
forming an isolation region disposed so as to isolate the lower electrodes of the pixels from each other and including at least a fixed charge film having a fixed charge.

### Claim 7

An electronic apparatus comprising:
a solid-state image pickup device including
a lower electrode provided in each of pixels so as to hold a photoelectric conversion film including an organic material between the lower electrode and an upper electrode, and
an isolation region disposed so as to isolate the lower electrodes of the pixels from each other and including at least a fixed charge film having a fixed charge.