# US 2018/0323348 A1 · Illumination device for desorbing molecules from inner walls of a processing chamber > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0323348 A1 - Document ID: US20180323348A1 - Status: Published application - Kind: A1 - Application number: 15/682,921 - Filed: 2017-08-22 - Published: 2018-11-08 - Earliest claimed: 2017-05-05 - Assignees: Applied Materials, Inc. - Applicants: Applied Materials, Inc. - Inventors: Ricardo Mateo Ramirez, III - Web page: https://patentgrep.com/patent/US20180323348A1 ## CPC - H10H 20/8506: {Containers} - C23C 16/4401: {Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber} - H10H 29/14: comprising multiple light-emitting semiconductor components - H10P 72/0436: {mainly by radiation} - H10P 72/0604: {Process monitoring, e.g. flow or thickness monitoring} - H10H 20/036: {of packages} - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract An illumination device is described for desorbing molecules from inner walls of a processing chamber. In some examples, the device includes a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber. ## Claims ### Claim 1 A desorption device for a processing chamber, the device comprising: a chassis; a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered; a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber; and an electrical system to activate the LEDs within the processing chamber. ### Claim 2 (depends on 1) The device of claim 1, wherein the chassis is formed of a thermally conductive material and the LEDs are thermally coupled to the chassis. ### Claim 3 (depends on 1) The device of claim 1, wherein the main housing comprises a bottom surface, wherein the chassis is on one side of the bottom surface and the other side of the bottom surface is configured to be placed on the wafer carrier, so that the bottom surface thermally isolates the wafer carrier from the chassis. ### Claim 4 (depends on 1) The device of claim 1, wherein the chassis further comprises a heat sink thermally coupled to the LEDs to absorb heat from the LEDs when the LEDs are activated. ### Claim 5 (depends on 4) The device of claim 4, wherein the heat sink comprises a phase change material. ### Claim 6 (depends on 5) The device of claim 5, wherein the chassis includes a cavity and wherein the phase change material is within the cavity. ### Claim 7 (depends on 6) The device of claim 6, wherein the phase change material comprises a paraffin filled metal foam. ### Claim 8 (depends on 4) The device of claim 4, wherein the chassis further comprises a battery well and wherein the battery well is thermally coupled to the heat sink through the chassis. ### Claim 9 (depends on 1) The device of claim 1, further comprising a top cover removably attached to the main housing to cover the chassis and to thermally isolate the chassis from the processing chamber. ### Claim 10 (depends on 9) The device of claim 9, wherein the top cover further comprises a window for each LED to allow the radiation from each LED to propagate through a respective window to the processing chamber. ### Claim 11 (depends on 10) The device of claim 10, wherein the top cover comprises a carrier for each window, the carrier having a gasket, a gasket seat, and an opening to allow radiation to propagate through the top cover, the gasket seat being between the window and the gasket seat so that the gasket is compressed when the window is pressed outward from the chassis toward the top cover. ### Claim 12 (depends on 9) The device of claim 9, further comprising an access port through the top cover and a port cover, the port cover being carried by rails attached to a bottom side of the top cover, the port cover having a groove to carry a gasket between the port cover and the top cover so that the gasket is compressed when the port cover is pressed outward from the chassis toward the top cover. ### Claim 13 (depends on 12) The device of claim 12, wherein the chassis further comprises a battery well and wherein the battery well comprises a coolant pipe configured to be thermally coupled to a battery when a battery is in the battery well, the coolant pipe having couplings below the top cover access port so that a coolant may be supplied to the coolant pipe when the access port is in an open position. ### Claim 14 (depends on 1) The device of claim 1, wherein the UV radiation is in a UV-C range. ### Claim 15 (depends on 1) The device of claim 1, wherein the plurality of LEDs include a first set of LEDs mounted symmetrically about a central axis extending orthogonal to a top surface of the chassis. ### Claim at position 16 -17. (canceled) ### Claim 18 An apparatus comprising: a processing chamber with vacuum seals; a vacuum pump to evacuate the chamber; an access door to insert a wafer; and a desorption device accessible through the access door, the device including a chassis, a plurality of light emitting diodes (LEDs) mounted to the chassis, wherein the plurality of LEDs emit ultraviolet (UV) radiation when electrically powered, a thermally non-conductive main housing surrounding the chassis and configured to be placed on a wafer carrier of the processing chamber, and an electrical system to activate the LEDs within the processing chamber. ### Claim 19 (depends on 18) The apparatus of claim 18, the desorption device further comprising a transceiver to receive commands from a remote control to actuate the LEDs. ### Claim 20 (depends on 18) The apparatus of claim 18, wherein the desorption device further comprises a top cover over the housing, an access port through the top cover, and a port cover, the port cover being carried by rails attached to a bottom side of the top cover, the port cover having a spring loaded button to maintain the port cover in a closed position during use.