# US 2018/0323128 A1 · Semiconductor package with electromagnetic interference shielding

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- Number: US 2018/0323128 A1
- Document ID: US20180323128A1
- Status: Published application
- Kind: A1
- Application number: 15/773,639
- Filed: 2015-12-22
- Published: 2018-11-08
- Earliest claimed: 2015-12-22
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: Rajendra C. Dias; Nachiket R. Raravikar
- Web page: https://patentgrep.com/patent/US20180323128A1

## CPC

- H10W 74/117: {the substrate having spherical bumps for external connection}
- H10W 10/011: {of isolation regions comprising dielectric materials}
- H10W 10/10: Isolation regions comprising dielectric materials
- H10W 42/20: protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
- H10W 42/273: {the arrangements being between laterally adjacent chips, e.g. walls between chips}
- H10W 42/276: {the arrangements being on an external surface of the package, e.g. on the outer surface of an encapsulation}
- H10W 42/284: {shielding resins}
- H10W 74/016: {using moulds}
- H10W 90/00: Package configurations
- H10P 70/70: {Cleaning only by lasers processes, e.g. laser ablation}
- H10W 74/014: {using batch processing}
- H10W 74/15: on active surfaces of flip-chip devices, e.g. underfills
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Semiconductor packages with electromagnetic interference (EMI) shielding and a method of manufacture therefor is disclosed. The semiconductor packages may house single electronic components or may be a system in a package (SiP) implementation. The EMI shielding may be provided on top of and along the periphery of the semiconductor package. The EMI shielding on the periphery may be formed of cured conductive ink or cured conductive paste disposed on sidewalls of molding that encapsulates the electronic component(s) provided on the semiconductor package. The top portion of the EMI shielding may be a laminated metal sheet provided on a top surface of the molding. The semiconductor package may further have vertical portions of the EMI shielding with conductive ink filled trenches in the molding that may separate one or more electronic components from other electronic components of the semiconductor package.

## Claims

### Claim 1

A microelectronics package, comprising:
a substrate having a top substrate surface and a substrate outer periphery, the top substrate surface having an electronic component mounted thereon and the top substrate surface having a conductive trace along at least a portion of the substrate outer periphery;
a molding compound provided over the top substrate surface, having a bottom molding surface, a top molding surface, and a molding sidewall substantially overlying the substrate outer periphery;
a metallic sheet provided over the top molding surface; and
epoxy provided on the molding sidewall, wherein the epoxy includes conductive particles, and wherein the epoxy is electrically coupled to the metallic sheet.

### Claim 2 (depends on 1)

The microelectronics package of claim 1, wherein the epoxy is further electrically coupled to the conductive trace.

### Claim 3 (depends on 2)

The microelectronics package of claim 2, wherein the conductive trace is electrically connected to at least one of: (i) ground, (ii) a direct current (DC) voltage, or (iii) a power line voltage of the microelectronics package.

### Claim 4 (depends on 1)

The microelectronics package of claim 1, wherein the substrate includes a core layer and at least one build-up layer having metal lines, wherein the metal lines include at least the conductive trace.

### Claim 5 (depends on 1)

The microelectronics package of claim 1, wherein the molding compound comprises a thermosetting epoxy compound.

### Claim 6 (depends on 1)

The microelectronics package of claim 1, wherein the epoxy is a first epoxy, and wherein the microelectronics package includes a second epoxy disposed between the top molding surface and the metallic sheet.

### Claim 7 (depends on 6)

The microelectronics package of claim 6, wherein the metal sheet comprises a laminate copper sheet, and wherein the laminate copper sheet adheres to the top molding surface by the second epoxy.

### Claim 8 (depends on 1)

The microelectronics package of claim 1, wherein the epoxy comprises at least one of: (i) cured conductive ink, (ii) cured conductive paste, or (iii) silver nanoparticles.

### Claim 9 (depends on 1)

The microelectronics package of claim 1, wherein the electronic component is a first electronic component, and wherein the microelectronics package further comprises:
a second electronic component; and
a conductive structure electrically connected to the conductive trace and the metallic sheet, and disposed between the first electronic component and the second electronic component in a trench formed in the molding extending from the bottom molding surface to the top molding surface.

### Claim 10 (depends on 1)

The microelectronics package of claim 1, further comprising a plurality of package-to-board electrical connections disposed on a bottom substrate surface of the substrate.

### Claim 11

A method, comprising:
providing a package substrate panel with a panel top surface;
electrically attaching a first electronic component and a second electronic component to the panel top surface;
forming a molding on the panel top surface, the molding having a bottom molding surface contacting the panel top surface and a top molding surface, wherein the molding encapsulates the first electronic component and the second electronic component;
depositing a first epoxy on the top molding surface;
forming a plurality of trenches in the molding, each of the plurality of trenches extending from the bottom molding surface to the top molding surface;
filling the plurality of trenches with a second epoxy, wherein the second epoxy comprises conductive particles;
laminating a metal sheet over the first epoxy; and
singulating a portion of the package substrate panel through a first of the plurality of filled trenches and an underlying portion of the package substrate panel.

### Claim 12 (depends on 11)

The method of claim 11, further comprising singulating a portion of the package substrate panel through a first of the plurality of filled trenches and an underlying portion of the package substrate panel.

### Claim 13 (depends on 12)

The method of claim 12, wherein singulating the portion of the package substrate panel through the first of the plurality of filled trenches and the underlying portion of the package substrate panel comprises:
cutting through the filled trench and the underlying portion of the package substrate panel, the cut having a cut width, wherein the cut width is less than a width of the first of the plurality of filled trenches.

### Claim 14 (depends on 11)

The method of claim 11, wherein the package substrate panel includes an electrical trace on the panel top surface, and wherein forming the plurality of trenches comprises removing molding from at least a part of a surface of the electrical trace.

### Claim 15 (depends on 11)

The method of claim 11, wherein the first of the plurality of filled trenches is disposed between the first electronic component and the second electronic component, and wherein the portion of the package substrate panel includes the first electronic component and not the second electronic component.

### Claim 16 (depends on 15)

The method of claim 15, wherein the portion of the package substrate panel includes a third electronic component, and wherein there is a second of the plurality of filled electrical trenches disposed between the first electronic component and the third electronic component.

### Claim 17 (depends on 11)

The method of claim 11, wherein attaching the first electronic component to the panel top surface comprises bonding copper pillars of the first electronic component onto one or more pads on the panel top surface.

### Claim 18 (depends on 11)

The method of claim 11, wherein forming the molding comprises:
depositing liquid molding epoxy on the panel top surface; and
applying pressure and heat using a chase to drive cross-linking of the liquid molding epoxy to form the molding.

### Claim 19 (depends on 11)

The method of claim 11, wherein forming the plurality of trenches comprises at least one of: (i) laser ablating the plurality of trenches, (ii) dry etching the plurality of trenches, or (iii) wet etching the plurality of trenches.

### Claim 20 (depends on 11)

The method of claim 11, wherein laminating the metal sheet over the first epoxy comprises heating and curing the first epoxy and the second epoxy.