# US 2018/0323086 A1 · Robot transport device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0323086 A1 - Document ID: US20180323086A1 - Status: Published application - Kind: A1 - Application number: 15/774,882 - Filed: 2016-10-28 - Published: 2018-11-08 - Earliest claimed: 2015-11-10 - Assignees: Sinfonia Technology Co., Ltd. - Applicants: Sinfonia Technology Co., Ltd. - Inventors: Takashi SHIGETA; Toshihiro KAWAI; Haruki TAKEUCHI; Yoshimasa SUDA; Hisashi GOMI; Shigenori OZAKI - Web page: https://patentgrep.com/patent/US20180323086A1 ## CPC - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - B25J 5/005: {mounted on endless tracks or belts} - B25J 15/00: Gripping heads {and other end effectors (grippers used in machine tools B23Q7/04; gripping members fitted on cranes B66C1/42, B66C1/44; gripping means used for mounting electrical components H05K13/04; gripping means used in the manufacture of semiconductors H10P72/7602)} - B65G 49/07: for semiconductor wafers {Not used, see H10P72/00}(specially adapted for conveying of semiconductor wafers during manufacture or treatment of semiconductor or electric solid state devices or components H10P72/00) - H10P 72/30: for conveying, e.g. between different workstations - H10P 72/3402: {Mechanical parts of transfer devices} - H10P 72/7602: {the wafers being placed on a robot blade or gripped by a gripper for conveyance} - B65G 2201/0297: Wafer cassette - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50}) - B65G: TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS (packaging B65B; handling thin or filamentary materials, e.g. paper sheets or thread, B65H; cranes B66C; portable mobile or lifting or hauling appliances, e.g. hoists, B66D; devices for lifting or lowering goods for loading or unloading purposes, e.g. fork-lift trucks, B66F9/00; emptying bottles, jars, casks, barrels or similar containers, not otherwise provided for, B67C9/00; delivering or transferring liquids B67D; filling or discharging vessels for liquefied, solidified or compressed gases F17C; pipe-line systems for fluids F17D) ## Abstract Gas is circulated in an entire transportation space. A robot transport device includes a transportation space in which a transport robot is provided and circulation passages by which gas in the transportation space is circulated. Around the transportation space, surrounding spaces are provided. To these surrounding spaces, an object is transported by the transport robot. The transportation space communicates with each of the surrounding spaces via each of openings. The circulation passages are provided to sandwich the transportation space to avoid a working area of the transport robot, including the openings. The circulation passages are provided in pillar portions forming the transportation space. ## Claims ### Claim at position 1 1: A robot transport device comprising: a transportation space in which a transport robot is provided, a plurality of surrounding spaces to each of which an object is transported by the transport robot being provided around the transportation space, and the transportation space communicating with the surrounding spaces via a plurality of openings, respectively; and a plurality of circulation passages by which gas in the transportation space is circulated, the circulation passages being provided to sandwich the transportation space so as to avoid a working area of the transport robot including the openings, the circulation passages being provided in pillar portions forming the transportation space. ### Claim at position 2 (depends on 1) 2: The robot transport device according to claim 1, wherein, the pillar portions are connected to a wall portion which forms the transportation space and is provided with the openings. ### Claim at position 3 (depends on 1) 3: The robot transport device according to claim 1, wherein, three or more of the openings are lined up along a predetermined arrangement direction, and one of the circulation passages is provided between every pair of openings neighboring each other in the arrangement direction, among the three or more of the openings. ### Claim at position 4 (depends on 1) 4: The robot transport device according to claim 1, wherein, the transport robot is movable in an arrangement direction of the openings, and a filter for removing dust in the gas is provided in a region where the gas circulated in the transportation space and the circulation passages passes. ### Claim at position 5 (depends on 4) 5: The robot transport device according to claim 4, wherein, the circulation passages extend to be parallel to one another along an orthogonal direction orthogonal to the arrangement direction, and each of the circulation passages communicates with the transportation space via an intake port on one end side and an exhaust port on the other end side and allows the gas in the transportation space sucked through the intake port to return to the transportation space from the exhaust port, a shared space is provided to allow the exhaust port of each of the circulation passages to communicate with the transportation space, and the gas exhausted from the exhaust port of each of the circulation passages flows from the other end side toward the one end side in the orthogonal direction so as to return to the transportation space via the shared space. ### Claim at position 6 (depends on 5) 6: The robot transport device according to claim 5, wherein, the shared space spreads over the entirety of a plane orthogonal to the orthogonal direction, relative to the transportation space.