# US 2018/0323069 A1 · Method and device for aligning a first substrate with a second substrate > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0323069 A1 - Document ID: US20180323069A1 - Status: Published application - Kind: A1 - Application number: 15/970,303 - Filed: 2018-05-03 - Published: 2018-11-08 - Earliest claimed: 2017-05-05 - Assignees: Suss Microtec Lithography GmbH - Applicants: SUSS MicroTec Lithography GmbH - Inventors: Katrin Schindler - Web page: https://patentgrep.com/patent/US20180323069A1 ## CPC - H10P 90/1914: {using bonding} - C09J 9/02: Electrically-conducting adhesives - G03F 9/7038: {Alignment for proximity or contact printer (proximity or contact printers per se G03F7/7035)} - G03F 9/7088: {Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection} - H10H 20/018: {Bonding of wafers} - H10P 10/128: {by direct semiconductor to semiconductor bonding} - H10P 72/57: {Mask-wafer alignment} - H10W 46/00: Marks applied to devices, e.g. for alignment or identification - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - C09J: ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES (preparation of glue or gelatine C09H) - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A method for aligning a first substrate, in particular a mask, with a second substrate, in particular a wafer, comprises inserting the first substrate and the second substrate into a positioning means; capturing at least one joint image of the first substrate and the second substrate; displaying the image; a plurality of image points in the image being marked by a user; and determining a control command for actuating the positioning means on the basis of the marked image points in such a way that the substrates are aligned with one another. ## Claims ### Claim 1 A method for aligning a first substrate, in particular a mask, with a second substrate, in particular a wafer, comprising: inserting the first substrate and the second substrate into a positioning means; capturing at least one joint image of the first substrate and the second substrate; displaying the image; a plurality of image points in the image being marked by a user; and determining a control command for actuating the positioning means on the basis of the marked image points, in such a way that the substrates are aligned with one another. ### Claim 2 (depends on 1) The method of claim 1 wherein the substrates are aligned with one another laterally in response to the positioning means receiving a control command. ### Claim 3 (depends on 1) The method according of claim 1 wherein, before the control command is determined, a machine state is detected, for example a current process step, a machine type or a machine configuration. ### Claim 4 (depends on 3) The method of claim 3 wherein the control command is additionally determined on the basis of the detected machine state. ### Claim 5 (depends on 1) The method of claim 1 wherein the plurality of image points are marked in the image by the user by clicking on the image points, for example using a peripheral device, or by dragging a mouse cursor. ### Claim 6 (depends on 1) The method of claim 1 wherein the plurality of image points are marked in the image by the user by touching a touch display. ### Claim 7 (depends on 1) The method of claim 1 wherein the method step of capturing the image comprises capturing a first joint image and a second joint image of the substrates, the first and the second joint image being displayed side by side, one above the other or alternately. ### Claim 8 (depends on 7) The method of claim 7 wherein at least two image points in the first joint image and at least two image points in the second joint image are marked. ### Claim 9 A device for aligning a first substrate with a second substrate, comprising a positioning means into which the substrates can be inserted; an image capture means which is configured to capture at least one joint image of the substrates inserted into the positioning means; an input device by means of which a plurality of image points can be marked in the image; and a control element which is configured to determine a control command for actuating the positioning means on the basis of the marked image points. ### Claim 10 (depends on 9) The device of claim 9 wherein the device comprises a display device, in particular a screen or a display, for displaying the image. ### Claim 11 (depends on 9) The device of claim 9 wherein the display device and the input device form a touch display. ### Claim 12 (depends on 9) The device of claim 9 wherein the input device is a peripheral device, for example a mouse, a trackball or a touchpad. ### Claim 13 (depends on 9) The device of claim 9 wherein the positioning means comprises a substrate positioning device for the first substrate and/or a substrate positioning device for the second substrate. ### Claim 14 (depends on 9) The device of claim 9 wherein the image capture means comprises at least one microscope. ### Claim 15 (depends on 9) The device of claim 9 wherein the image capture means comprises a number of image cameras, which are arranged above and/or below and/or inside the positioning means. ### Claim 16 (depends on 9) The device of claim 9 wherein the image capture means comprises a movement means for positioning the number of image cameras, the movement means being controllable by means of the input device.