# US 2018/0323044 A1 · Chamber with vertical support stem for symmetric conductance and rf delivery > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0323044 A1 - Document ID: US20180323044A1 - Status: Published application - Kind: A1 - Application number: 16/039,229 - Filed: 2018-07-18 - Published: 2018-11-08 - Earliest claimed: 2015-04-17 - Assignees: Lam Research Corporation - Applicants: Lam Research Corporation - Inventors: Daniel Arthur Brown; John Patrick Holland; Michael C. Kellogg; James E. Tappan; Jerrel K. Antolik; Ian Kenworthy; Theo Panagopoulos; Zhigang Chen - Web page: https://patentgrep.com/patent/US20180323044A1 ## CPC - H01J 37/32816: {Pressure} - H01J 37/32082: {Radio frequency generated discharge (H01J37/32357, H01J37/32366, H01J37/32394 and H01J37/32403 take precedence)} - H01J 37/32183: {Matching circuits} - H01J 37/32651: {Shields, e.g. dark space shields, Faraday shields} - H01J 37/32724: {Temperature} - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract A plasma chamber is provided to increase conductance within the plasma chamber and to increase uniformity of the conductance. A radio frequency (RF) path for supplying power to the plasma chamber is symmetric with respect to a center axis of the plasma chamber. Moreover, pumps used to remove materials from the plasma chamber are located symmetric with respect to the center axis. The symmetric arrangements of the RF paths and the pumps facilitate an increase in conductance uniformity within the plasma chamber. ## Claims ### Claim 1 A system for providing symmetric delivery of radio frequency (RF) power to a lower electrode within a plasma chamber, comprising: the lower electrode having a bottom side; and an RF rod having a bowl-shaped portion and a column-shaped portion, wherein the bowl-shaped portion of the RF rod has a lower bowl side that is coupled to the column-shaped portion of the RF rod, wherein the bowl-shaped portion of the RF rod has an upper bowl side that is coupled to the bottom side of the lower electrode, wherein the upper bowl side of the RF rod has a rim that is disposed symmetrically proximate to a periphery of the bottom side of the lower electrode to symmetrically deliver the RF power to the lower electrode. ### Claim 2 (depends on 1) The system of claim 1, further comprising: a chuck support column that surrounds the column-shaped portion of the RF rod; a bowl-shaped structure that is supported on and coupled to the chuck support column, wherein the bowl-shaped structure surrounds the bowl-shaped portion of the RF rod and is configured to support the lower electrode. ### Claim 3 (depends on 2) The system of claim 2, further comprising: a side wall of the plasma chamber, wherein the side wall surrounds the bowl-shaped structure; a transition flange coupled to the side wall, wherein the transition flange has a transition flange opening for allowing passage of the chuck support column from below the plasma chamber to within the plasma chamber to support the bowl-shaped structure, wherein the transition flange has a plurality of exhaust openings that are symmetrically located with respect to the transition flange opening for facilitating symmetric conductance of remnants of plasma to a plurality of vacuum pumps. ### Claim 4 (depends on 2) The system of claim 2, wherein the RF rod is symmetrically situated with respect to the chuck support column and the bowl-shaped structure. ### Claim 5 (depends on 1) The system of claim 1, wherein the RF rod has a hollow space, the system further comprising a gas line passing through the hollow space of the RF rod for supplying one or more gases to change a temperature of the lower electrode. ### Claim 6 (depends on 1) The system of claim 1, wherein the RF rod has a hollow space, the system further comprising a fluid line passing through the hollow space of the RF rod for supplying a heating fluid to heat the lower electrode. ### Claim 7 (depends on 1) The system of claim 1, wherein the lower electrode has a top side that is oppositely located with respect to the bottom side of the lower electrode, wherein the top side is configured to support a substrate to be processed. ### Claim 8 (depends on 1) The system of claim 1, wherein the bowl-shaped portion is surrounded by a bowl-shaped structure, wherein the bowl-shaped structure is located within the plasma chamber. ### Claim 9 (depends on 8) The system of claim 8, wherein the column-shaped portion is surrounded by a chuck support column, wherein the chuck support column is configured to support the bowl-shaped structure. ### Claim 10 (depends on 1) The system of claim 1, wherein the rim is a periphery of the upper bowl side of the RF rod and is in contact with the bottom side of the lower electrode to provide RF power to the lower electrode. ### Claim 11 A system for increasing uniformity in conductance within a plasma chamber, comprising: a side wall; a chuck support column, wherein the chuck support column includes a hollow space; a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column; a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to the conductance of remnant materials within the plasma chamber from the lower electrode to a plurality of vacuum openings formed within the transition flange; a radio frequency (RF) rod extending via the transition flange opening and the hollow space of the chuck support column to the lower electrode within the plasma chamber to provide RF power to the lower electrode; and a plurality of baffles located on top of the plurality of vacuum openings, wherein the plurality of baffles are configured to vertically move with respect to the plurality of vacuum openings to control the conductance and a pressure at a region adjacent to the transition flange, wherein the plurality of baffles are symmetrically located with respect to a center axis of the RF rod. ### Claim 12 (depends on 11) The system of claim 11, further comprising: a gas line extending via the transition flange opening and a hollow space of the RF rod to one or more inlets formed within the lower electrode to supply one or more gases to change a temperature of the lower electrode; or a fluid line extending via the transition flange opening and the hollow space of the RF rod to the lower electrode to supply a fluid to heat or cool the lower electrode; or a conductor extending via the transition flange opening and the hollow space of the RF rod to a thermocouple that is proximate to the lower electrode to measure a temperature of the lower electrode; or a lift rod extending via the transition flange opening and the hollow space of the RF rod to a lift pin embedded within the lower electrode, wherein the lift pin is configured to be moved in a vertical direction with respect to the plasma chamber to change a height of a wafer with respect to the lower electrode. ### Claim 13 (depends on 11) The system of claim 11, wherein the side wall has a diameter greater than a diameter of a plasma chamber that is used to process a wafer having a diameter of 300 millimeters. ### Claim 14 (depends on 11) The system of claim 11, further comprising a plurality of vacuum pumps interfaced with the plurality of vacuum openings, wherein the plurality of vacuum pumps are placed symmetric with respect to the lower electrode. ### Claim 15 (depends on 11) The system of claim 11, further comprising a grid fitted between the lower electrode and the side wall to control the conductance and a pressure within the plasma chamber. ### Claim 16 (depends on 11) The system of claim 11, further comprising a bowl-shaped structure that is fitted on top of the chuck support column, wherein the bowl-shaped structure supports the lower electrode and is located between the chuck support column and the lower electrode. ### Claim 17 (depends on 11) The system of claim 11, further comprising a linear drive assembly configured to move the chuck support column in a vertical direction with respect to the side wall to control a gap formed between the lower electrode and an upper electrode of the plasma chamber. ### Claim 18 (depends on 11) The system of claim 11, further comprising: an impedance matching network configured to be attached to a bottom of the RF rod. ### Claim 19 A system for increasing uniformity in conductance within a plasma chamber, comprising: a side wall; a chuck support column, wherein the chuck support column includes a hollow space; an inductively coupled plasma (ICP) circuit assembly placed on top of the side wall; a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column; a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to the conductance of remnant materials within the plasma chamber from the lower electrode to a plurality of vacuum openings formed within the transition flange; a radio frequency (RF) rod extending via the transition flange opening and the hollow space of the chuck support column to the lower electrode within the plasma chamber to provide RF power to the lower electrode; and a plurality of baffles located on top of the plurality of vacuum openings, wherein the plurality of baffles are configured to vertically move with respect to the plurality of vacuum openings to control the conductance and a pressure at a region adjacent to the transition flange, wherein the plurality of baffles are symmetrically located with respect to a center axis of the RF rod. ### Claim 20 (depends on 19) The system of claim 19, further comprising: a gas line extending via the transition flange opening and a hollow space of the RF rod to one or more inlets formed within the lower electrode to supply one or more gases to change a temperature of the lower electrode; or a fluid line extending via the transition flange opening and the hollow space of the RF rod to the lower electrode to supply a fluid to heat or cool the lower electrode; or a conductor extending via the transition flange opening and the hollow space of the RF rod to a thermocouple that is proximate to the lower electrode to measure a temperature of the lower electrode; or a lift rod extending via the transition flange opening and the hollow space of the RF rod to a lift pin embedded within the lower electrode, wherein the lift pin is configured to be moved in a vertical direction with respect to the plasma chamber to change a height of a wafer with respect to the lower electrode. ### Claim 21 (depends on 19) The system of claim 19, wherein the side wall has a diameter greater than a diameter of a plasma chamber that is used to process a wafer having a diameter of 300 millimeters. ### Claim 22 (depends on 19) The system of claim 19, further comprising a plurality of vacuum pumps interfaced with the plurality of vacuum openings, wherein the plurality of vacuum pumps are placed symmetric with respect to the lower electrode. ### Claim 23 (depends on 19) The system of claim 19, further comprising a grid fitted between the lower electrode and the side wall to control the conductance and a pressure within the plasma chamber. ### Claim 24 A system for increasing uniformity in conductance within a plasma chamber, comprising: a side wall; a chuck support column, wherein the chuck support column includes a hollow space; a capacitively coupled plasma (CCP) circuit assembly placed on top of the side wall; a lower electrode situated within an enclosure surrounded by the side wall, wherein the lower electrode is supported by the chuck support column; a transition flange located below and adjacent to the side wall, wherein the transition flange includes a transition flange opening, wherein the transition flange opening is located coaxial with respect to the lower electrode such that the chuck support column passes via the transition flange opening and reduces impedance to the conductance of remnant materials within the plasma chamber from the lower electrode to a plurality of vacuum openings formed within the transition flange; a radio frequency (RF) rod extending via the transition flange opening and the hollow space of the chuck support column to the lower electrode within the plasma chamber to provide RF power to the lower electrode; and a plurality of baffles located on top of the plurality of vacuum openings, wherein the plurality of baffles are configured to vertically move with respect to the plurality of vacuum openings to control the conductance and a pressure at a region adjacent to the transition flange, wherein the plurality of baffles are symmetrically located with respect to a center axis of the RF rod. ### Claim 25 (depends on 24) The system of claim 24, further comprising: a gas line extending via the transition flange opening and a hollow space of the RF rod to one or more inlets formed within the lower electrode to supply one or more gases to change a temperature of the lower electrode; or a fluid line extending via the transition flange opening and the hollow space of the RF rod to the lower electrode to supply a fluid to heat or cool the lower electrode; or a conductor extending via the transition flange opening and the hollow space of the RF rod to a thermocouple that is proximate to the lower electrode to measure a temperature of the lower electrode; or a lift rod extending via the transition flange opening and the hollow space of the RF rod to a lift pin embedded within the lower electrode, wherein the lift pin is configured to be moved in a vertical direction with respect to the plasma chamber to change a height of a wafer with respect to the lower electrode. ### Claim 26 (depends on 24) The system of claim 24, wherein the side wall has a diameter greater than a diameter of a plasma chamber that is used to process a wafer having a diameter of 300 millimeters. ### Claim 27 (depends on 24) The system of claim 24, further comprising a plurality of vacuum pumps interfaced with the plurality of vacuum openings, wherein the plurality of vacuum pumps are placed symmetric with respect to the lower electrode.