# US 2018/0322993 A1 · Magnetic pick and place probe

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- Number: US 2018/0322993 A1
- Document ID: US20180322993A1
- Status: Published application
- Kind: A1
- Application number: 15/770,747
- Filed: 2015-12-21
- Published: 2018-11-08
- Earliest claimed: 2015-12-21
- Assignees: Intel Corporation
- Applicants: Intel Corporation
- Inventors: Kyle YAZZIE; Pramod MALATKAR
- Web page: https://patentgrep.com/patent/US20180322993A1

## CPC

- H01F 7/0257: {Lifting, pick-up magnetic objects}
- B25J 15/0608: {with magnetic holding means}
- B81C 99/002: {Apparatus for assembling MEMS, e.g. micromanipulators (micromanipulators per se B25J7/00)}
- G01R 1/06705: {Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886)}
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- B25J: MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ({manipulators specially adapted for use in surgery A61B34/70; manipulators used in cleaning hollow articles B08B9/04}; manipulators associated with rolling mills B21B39/20; manipulators associated with forging machines B21J13/10; {manipulators associated with picking-up and placing mechanisms B23P19/007}; means for holding wheels or parts thereof B60B30/00; {vehicles with ground-engaging propulsion means, e.g. walking members B62D57/02, B62D57/032; devices for picking-up and depositing articles or materials between conveyors B65G47/90, B65G47/91; manipulators with gripping or holding means for transferring packages B65H67/065}; cranes B66C; {manipulators used in the protection or supervision of pipe-line installations F17D5/00; walking equipment adapted for nuclear steam-generators F22B37/006}; manipulators specially adapted for, or associated with, nuclear reactors G21C; {apparatus used for handling wafers during manufacture or treatment of semiconductor H10P72/50})
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)

## Abstract

A magnetic pick and place probe includes an outer sheath, an inner sheath to vertically slide within the outer sheath, None or more sheath magnets attached to a bottom end of the inner sheath and a tip positioned at a bottom end of the outer sheath to simultaneously pick up an array of magnets for placement on a substrate.

## Claims

### Claim 1

A magnetic pick and place probe, comprising:
an outer sheath;
an inner sheath to vertically slide within the outer sheath;
one or more sheath magnets attached to a bottom end of the inner sheath; and
a tip positioned at a bottom end of the outer sheath to simultaneously pick up an array of magnets for placement on a substrate.

### Claim 2 (depends on 1)

The probe of claim 1 wherein the sheath magnets are positioned against the tip when the inner sheath is positioned at a bottom end of the outer sheath.

### Claim 3 (depends on 2)

The probe of claim 2 wherein the sheath magnets align each the array of magnets with the tip via a magnetic force while the sheath magnets are positioned against the tip.

### Claim 4 (depends on 3)

The probe of claim 3 wherein the sheath magnets control alignment of the each the array of magnets in an x-y plane.

### Claim 5 (depends on 4)

The probe of claim 4 wherein the tip controls alignment of the each the array of magnets in a z plane.

### Claim 6 (depends on 2)

The probe of claim 2 wherein the sheath magnets are disengaged from the tip upon sliding the inner sheath from the bottom end of the outer sheath.

### Claim 7 (depends on 6)

The probe of claim 6 wherein the magnetic force is removed on the array of magnets upon the sheath magnets being disengaged from the tip.

### Claim 8 (depends on 7)

The probe of claim 7 wherein the array of magnets is held the tip upon the sheath magnets being disengaged from the tip.

### Claim 9

An apparatus comprising:
a substrate; and
a magnetic pick and place probe, including:
an outer sheath;
an inner sheath to vertically slide within the outer sheath;
one or more sheath magnets attached to a bottom end of the inner sheath; and
a tip positioned at a bottom end of the outer sheath to simultaneously pick up an array of magnets for placement on the substrate.

### Claim 10 (depends on 9)

The apparatus of claim 9 wherein the sheath magnets are positioned against the tip when the inner sheath is positioned at a bottom end of the outer sheath.

### Claim 11 (depends on 10)

The apparatus of claim 10 wherein the sheath magnets align each the array of magnets with the tip via a magnetic force while the sheath magnets are positioned against the tip.

### Claim 12 (depends on 11)

The apparatus of claim 11 wherein the sheath magnets control alignment of the each the array of magnets in an x-y plane.

### Claim 13 (depends on 12)

The apparatus of claim 12 wherein the tip controls alignment of the each the array of magnets in a z plane.

### Claim 14 (depends on 10)

The apparatus of claim 10 further comprising a Micro-electro-mechanical systems (MEMS) device mounted on the substrate.

### Claim 15 (depends on 14)

The apparatus of claim 14 wherein the probe places the array of magnets on the substrate in alignment with the MEMS device.

### Claim 16 (depends on 15)

The apparatus of claim 15 wherein the inner sheath is pulled away from the bottom end of the outer sheath upon placement of the array of magnets on the substrate.

### Claim 17 (depends on 16)

The apparatus of claim 16 wherein the sheath magnets are disengaged from the tip upon the inner sheath being pulled from the bottom end of the outer sheath.

### Claim 18 (depends on 17)

The apparatus of claim 17 wherein the magnetic force is removed on the array of magnets upon the sheath magnets being disengaged from the tip.

### Claim 19 (depends on 18)

The apparatus of claim 18 wherein the array of magnets is held the tip upon the sheath magnets being disengaged from the tip.

### Claim 20

An apparatus comprising:
a substrate; and
a magnetic pick and place probe, including:
an outer sheath;
an inner sheath to vertically slide within the outer sheath;
one or more sheath magnets attached to a bottom end of the inner sheath; and
a tip positioned at a bottom end of the outer sheath to simultaneously pick up an array of magnets for placement on the substrate;
a robot; and
a gripper coupled to the robot to grasp the probe.

### Claim 21 (depends on 20)

The apparatus of claim 20 wherein the sheath magnets are positioned against the tip when the inner sheath is positioned at a bottom end of the outer sheath.

### Claim 22 (depends on 21)

The apparatus of claim 21 wherein the sheath magnets align each the array of magnets with the tip via a magnetic force while the sheath magnets are positioned against the tip.

### Claim 23 (depends on 22)

The apparatus of claim 22 wherein the sheath magnets control alignment of the each the array of magnets in an x-y plane and the tip controls alignment of the each the array of magnets in a z plane.

### Claim 24 (depends on 21)

The apparatus of claim 21 further comprising a Micro-electro-mechanical systems (MEMS) device mounted on the substrate, wherein the probe places the array of magnets on the substrate in alignment with the MEMS device.

### Claim 25 (depends on 24)

The apparatus of claim 24 wherein the inner sheath is pulled away from the bottom end of the outer sheath upon placement of the array of magnets on the substrate and the sheath magnets are disengaged from the tip upon the inner sheath being pulled from the bottom end of the outer sheath.