# US 2018/0321784 A1 · Pressure sensor and composite element having same

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- Number: US 2018/0321784 A1
- Document ID: US20180321784A1
- Status: Published application
- Kind: A1
- Application number: 15/773,999
- Filed: 2016-10-28
- Published: 2018-11-08
- Earliest claimed: 2015-11-05
- Assignees: Moda-Innochips Co., Ltd.
- Applicants: Moda-Innochips Co., Ltd.
- Inventors: In Kil PARK; Jun Ho JUNG
- Web page: https://patentgrep.com/patent/US20180321784A1

## CPC

- G01L 9/008: {using piezoelectric devices (piezoelectric resonators G01L9/0022; surface acoustic waves G01L9/0025)}
- G01L 9/0072: {using variations in capacitance}
- G06V 40/1306: {non-optical, e.g. ultrasonic or capacitive sensing}
- G06V 40/1329: {Protecting the fingerprint sensor against damage caused by the finger}
- G01L 1/16: using properties of piezoelectric devices
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- G06V: IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING

## Abstract

The present invention proposes a pressure sensor and a complex device provided with the same, the pressure sensor including: first and second electrode layers provided to be spaced apart from each other and respectively including first and second electrodes facing each other; and a piezoelectric layer provided between the first and second electrode layers, wherein the piezoelectric layer includes a plurality of plate-like piezoelectric bodies in a polymer.

## Claims

### Claim 1

A pressure sensor comprising:
first and second electrode layers provided to be spaced apart from each other and respectively comprising first and second electrodes facing each other; and
a piezoelectric layer provided between the first and second electrode layers, wherein the piezoelectric layer comprises a plurality of plate-like piezoelectric bodies in a polymer.

### Claim 2 (depends on 1)

The pressure sensor of claim 1, wherein the piezoelectric bodies are arranged in plurality in one direction and another direction crossing each other in a horizontal direction and are arranged in plurality in a vertical direction.

### Claim 3 (depends on 1)

The pressure sensor of claim 1, wherein the piezoelectric bodies are provided to have densities of 30% to 99%.

### Claim 4 (depends on 1)

The pressure sensor of claim 1, wherein the piezoelectric bodies are single crystals.

### Claim 5 (depends on 3)

The pressure sensor of claim 3, wherein the piezoelectric bodies each comprises a seed composition formed of:
an orientation raw material composition composed of a piezoelectric material having a Perovskite crystalline structure; and
an oxide which is distributed in the orientation raw material composition and has a general formula ABO3 (A is a bivalent metal element, and B is a tetravalent metal element).

### Claim 6

A pressure sensor comprising:
first and second electrode layers provided to be spaced apart from each other and respectively comprising first and second electrodes facing each other;
a piezoelectric layer provided between the first and second electrode layers; and
a plurality of cutaway portions formed with predetermined widths and at a predetermined depth in the piezoelectric layer.

### Claim 7 (depends on 6)

The pressure sensor of claim 6, wherein the cutaway portions are formed to a depth of 50% to 100% of a thickness of the piezoelectric layer.

### Claim 8 (depends on 7)

The pressure sensor of claim 7, wherein the cutaway portions are formed such that at least one thereof corresponds to an interval between the plurality of first and second electrodes which are arranged at predetermined intervals.

### Claim 9 (depends on 6)

The pressure sensor of claim 6, further comprising an elastic layer provided inside the cutaway portions.

### Claim 10 (depends on 6)

The pressure sensor of claim 6, wherein the piezoelectric layer is single-crystalline.

### Claim 11 (depends on 6)

The pressure sensor of claim 6, wherein the piezoelectric layer comprises a seed composition formed of:
an orientation raw material composition composed of a piezoelectric material having a Perovskite crystalline structure; and
an oxide which is distributed in the orientation raw material composition and has a general formula ABO3 (A is a bivalent metal element, and B is a tetravalent metal element).

### Claim 12 (depends on 1)

A complex device comprising:
a pressure sensor set forth in claim 1; and
at least one functional part having a function different from that of the pressure sensor.

### Claim 13 (depends on 12)

The complex device of claim 12, wherein the functional part comprises: a piezoelectric device provided on one side of the pressure sensor; and a vibration plate provided on one side of the piezoelectric device.

### Claim 14 (depends on 13)

The complex device of claim 13, wherein the piezoelectric device is used as a piezoelectric vibration apparatus or a piezoelectric acoustic apparatus according to a signal applied thereto.

### Claim 15 (depends on 12)

The complex device of claim 12, wherein the functional part is provided on one side of the pressure sensor and comprises at least one among an NFC, a WPC, and an MST each of which comprises at least one antenna pattern.

### Claim 16 (depends on 12)

The complex device of claim 12, wherein the functional part comprises:
a piezoelectric device provided on one surface of the pressure sensor;
a vibration plate provided on one surface of the piezoelectric device; and
at least one among an NFC, a WPC, and an MST which are provided on the other surface of the pressure sensor or on one surface of the vibration plate.

### Claim 17 (depends on 12)

The complex device of claim 12 comprising a fingerprint detection part electrically connected to the pressure sensor and configured to measure, from the pressure sensor, a difference in acoustic impedance generated by an ultrasonic signal at valleys and ridges of the fingerprint and thereby detects the fingerprint.
