# US 2018/0321643 A1 · Actuator Apparatus, Electronic Device, And Control Method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0321643 A1 - Document ID: US20180321643A1 - Status: Published application - Kind: A1 - Application number: 16/023,240 - Filed: 2018-06-29 - Published: 2018-11-08 - Earliest claimed: 2014-05-01 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Nozomu HIROKUBO - Web page: https://patentgrep.com/patent/US20180321643A1 ## CPC - G05B 11/14: in which the output signal represents a discontinuous function of the deviation from the desired value, i.e. discontinuous controllers (G05B11/26 takes precedence) - G01J 3/027: {Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation} - G01J 3/10: Arrangements of light sources specially adapted for spectrometry or colorimetry - G01J 3/26: using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters - G01J 3/505: {measuring the colour produced by lighting fixtures other than screens, monitors, displays or CRTs} - G02B 5/286: {having four or fewer layers, e.g. for achieving a colour effect} - G02B 5/288: {comprising at least one thin film resonant cavity, e.g. in bandpass filters} - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - H02N 1/006: {of the gap-closing type (H02N1/004 takes precedence)} - B81B 2201/031: Thermal actuators - G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G) - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) ## Abstract An actuator apparatus includes a pair of substrates facing each other; a plurality of bias actuators that each vary a gap dimension of a gap between the pair of substrates; a gap detection portion that detects the gap dimension; and a voltage control unit that controls driving of each of the bias actuators on the basis of the detected gap dimension. The bias actuators are located asymmetric relative to a driving central axis and are mutually independently driven; and the voltage control unit derives driving parameters for use in driving the bias actuators, on the basis of voltages and gap dimensions obtained by sequentially switching and driving the bias actuators on by one. ## Claims ### Claim 1 An actuator apparatus comprising: a first substrate; a second substrate that faces the first substrate; a first reflecting film that is disposed on the first substrate; a second reflecting film that is disposed on the second substrate, the second reflecting film facing the first reflecting film; a plurality of bias electrostatic actuators that is disposed so as to surround the first reflecting film and the second reflecting film in plan view; a control electrostatic actuator that is disposed so as to surround the first reflecting film and the second reflecting film in plan view; a gap detector that detects a gap between the first reflection film and the second reflection film based on a capacitance between the first reflection film and the second reflection film; and a driving controller that controls the plurality of bias electrostatic actuators and the control electrostatic actuator, the driving controller applying a bias voltage to one of the plurality of bias electrostatic actuators, the driving controller applying a feedback voltage to the control electrostatic actuator, the feedback voltage being generated based on the capacitance, the driving controller deriving a driving parameter to drive the one of the plurality of bias electrostatic actuators based on a voltage supplied to each of the plurality of bias electrostatic actuators and the gap at a time of the supply of the voltage thereto. ### Claim 2 (depends on 1) The actuator apparatus according to claim 1, the driving controller calculating an inclination state between the first reflection film and the second reflection film, and a plurality of bias voltages for keeping the first reflection film and the second reflection film in a state of being parallel. ### Claim 3 (depends on 1) The actuator apparatus according to claim 1, the plurality of bias electrostatic actuators including a first bias electrostatic actuator, a second bias electrostatic actuator, a third bias electrostatic actuator, and a fourth bias electrostatic actuator. ### Claim 4 (depends on 1) The actuator apparatus according to claim 1, the control electrostatic actuator surrounding the plurality of bias actuators. ### Claim 5 (depends on 2) The actuator apparatus according to claim 2, the driving controller applying a first voltage at a first time and a second voltage at a second time to the one of the plurality of bias electrostatic actuators, the driving controller applying the first voltage at a third time and the second voltage at a fourth time to another one of the plurality of bias electrostatic actuators. ### Claim 6 (depends on 1) An electronic device comprising: the actuator apparatus according to claim 1; and a processing controller that designates a target value of the gap to thereby control the actuator apparatus. ### Claim 7 A control method of an actuator apparatus comprising: supplying a voltage to each of a plurality of electrostatic actuators; detecting an amount of a gap between a first reflection film and a second reflection film based on a capacitance between the first reflection film and the second reflection film, the plurality of bias electrostatic actuator being disposed so as to surround the first reflection film and the second reflection film in plan view, a control electrostatic actuator being disposed so as to surround the first reflection film and the second reflection film in plan view, a bias voltage being applied to one of the plurality of bias electrostatic actuators, a feedback voltage being applied to the control electrostatic actuator, the feedback voltage being generated based on the capacitance; deriving a driving parameter to drive each of the plurality of electrostatic actuators on the basis of the voltage and the amount of the gap at a time of the supply of the voltage thereto.