# US 2018/0321604 A1 · Imprint apparatus and method of controlling the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0321604 A1 - Document ID: US20180321604A1 - Status: Published application - Kind: A1 - Application number: 15/964,528 - Filed: 2018-04-27 - Published: 2018-11-08 - Earliest claimed: 2017-05-08 - Assignees: Canon Kabushiki Kaisha - Applicants: Canon Kabushiki Kaisha - Inventors: Hisashi Namba; Yuichi Takahashi - Web page: https://patentgrep.com/patent/US20180321604A1 ## CPC - G03F 9/7042: {Alignment for lithographic apparatus using patterning methods other than those involving the exposure to radiation, e.g. by stamping or imprinting (non-exposure lithographic processes per se G03F7/0002)} - G03F 7/0002: {Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping} - G03F 9/7088: {Alignment mark detection, e.g. TTR, TTL, off-axis detection, array detector, video detection} - B82Y 10/00: Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic - B82Y 40/00: Manufacture or treatment of nanostructures - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES ## Abstract An imprint apparatus comprises: a dispensing unit that dispenses a liquid to a substrate; a first measurement unit that measures a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit that measures a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit that controls the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit. ## Claims ### Claim 1 An imprint apparatus, comprising: a dispensing unit configured to dispense a liquid to a substrate; a first measurement unit configured to measure a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; a second measurement unit configured to measure a position of the liquid on the substrate that is dispensed by the dispensing unit; and a control unit configured to control the measurement by the first measurement unit and the second measurement unit, wherein the control unit performs measurement by the second measurement unit based on a measurement result by the first measurement unit. ### Claim 2 (depends on 1) The imprint apparatus according to claim 1, wherein the control unit performs measurement by the second measurement unit in a case where the time measured by the first measurement unit exceeds a predetermined threshold. ### Claim 3 (depends on 1) The imprint apparatus according to claim 1, wherein the dispensing unit comprises a plurality of nozzles, and the first measurement unit performs measurement with respect to each of the plurality of nozzles. ### Claim 4 (depends on 3) The imprint apparatus according to claim 3, wherein the control unit performs measurement by the second measurement unit in a case where the time measured by the first measurement unit corresponding to at least one nozzle exceeds a predetermined threshold. ### Claim 5 (depends on 3) The imprint apparatus according to claim 3, wherein the first measurement unit performs measurement a plurality of times in relation to one nozzle, and the control unit uses an average of the plurality of measurements as a measurement result for the one nozzle. ### Claim 6 (depends on 3) The imprint apparatus according to claim 3, wherein the control unit determines that a dispense failure occurred for a nozzle in a case where the time measured by the first measurement unit exceeds a predetermined value for the nozzle. ### Claim 7 (depends on 1) The imprint apparatus according to claim 1, further comprising: a calculation unit configured to calculate an amount of correction for correcting a timing of dispensing of a liquid by the dispensing unit, based on the measurement result by the second measurement unit; and a correction unit configured to correct a timing of dispensing by the dispensing unit, based on the amount of correction calculated by the calculation unit. ### Claim 8 (depends on 1) The imprint apparatus according to claim 1, wherein the control unit causes measurement by the first measurement unit to be performed for each substrate replacement. ### Claim 9 (depends on 1) The imprint apparatus according to claim 1, wherein the time of measurement by the first measurement unit is less than the time of measurement by the second measurement unit. ### Claim 10 A method of controlling an imprint apparatus comprising a dispensing unit for dispensing a liquid to a substrate, the method comprising: performing a first measurement of a time from when a signal for causing the liquid to be dispensed is outputted to the dispensing unit until when the dispensed liquid passes through a predetermined position; and performing a second measurement of a position at which the liquid is dispensed by the dispensing unit onto the substrate, based on the measurement result by the first measurement.