# US 2018/0321601 A1 · Movable body apparatus, exposure apparatus, manufacturing method of flat panel display, device manufacturing method, and movable body drive method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0321601 A1 - Document ID: US20180321601A1 - Status: Published application - Kind: A1 - Application number: 16/031,346 - Filed: 2018-07-10 - Published: 2018-11-08 - Earliest claimed: 2014-03-28 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Akinori SHIRATO - Web page: https://patentgrep.com/patent/US20180321601A1 ## CPC - G03F 7/70775: {Position control, e.g. interferometers or encoders for determining the stage position} - G02F 1/1303: {Apparatus specially adapted to the manufacture of LCDs} - G03F 7/0005: {Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor} - G03F 7/20: Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) - G03F 7/70716: {Stages} - G03F 7/70725: {control} - G03F 9/7049: {Technique, e.g. interferometric} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS ## Abstract A substrate stage apparatus provided with: a substrate holder that can be moved in a plane including an X-axis and a Y-axis; a head unit that can be moved synchronously with the substrate holder along the Y-axis; an encoder system for measuring substrate position, the system including a scale disposed on the substrate holder, and heads disposed on the head unit, and acquiring the X-axis direction and the Y-axis direction position information of the substrate holder on the basis of the output of the heads; an encoder system for measuring head-unit position, the system acquiring the Y-axis direction position information of the head unit; and a position control system that controls the position of the substrate holder within the XY plane on the basis of the output of the encoder system for measuring substrate position and the encoder system for measuring head-unit position. ## Claims ### Claim 1 An exposure apparatus that performs scanning exposure of an object by relatively driving the object with respect to an optical system, the apparatus comprising: a first movable body that holds the object and is movable in a first direction and a second direction intersecting each other; a reference member serving as a reference for movement of the first movable body in the first direction and the second direction; a second movable body disposed between the first movable body and the reference member, and movable in the second direction; a first measurement system that acquires position information of the first movable body in the first direction with respect to the reference member, with a first head disposed at one of the first movable body and the second movable body and a first scale disposed at the other of the first movable body and the second movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure; and a second measurement system that acquires position information of the first movable body in the second direction with respect to the reference member, with a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member that can measure a movement range of the first movable body in the second direction at the time of the scanning exposure. ### Claim 2 (depends on 1) The exposure apparatus according to claim 1, further comprising: a control system that controls a position of the first movable body with respect to the reference member, wherein the first measurement system acquires the position information by the first head measuring the first scale having a measurement component in the second direction, the second measurement system acquires the position information by the second head measuring the second scale having a measurement component in the first direction, and the control system controls the position of the first movable body with respect to the reference member, on the basis of the position information acquired by the first measurement system and the second measurement system. ### Claim 3 (depends on 1) The exposure apparatus according to claim 1, wherein the object is a substrate used in a flat panel display. ### Claim 4 (depends on 3) The exposure apparatus according to claim 3, wherein the substrate has at least one of a side length and a diagonal length that is 500 mm and over. ### Claim 5 (depends on 1) A manufacturing method of a flat panel display, comprising: exposing the object using the exposure apparatus according to claim 1; and developing the object which has been exposed. ### Claim 6 (depends on 1) A device manufacturing method, comprising: exposing the object using the exposure apparatus according to claim 1; and developing the object which has been exposed. ### Claim 7 An exposure method in which scanning exposure of an object is performed by relatively scanning the object with respect to an optical system, the method comprising: acquiring position information of a first movable body, which holds the object and is movable in a first direction and a second direction intersecting each other, in the first direction with respect to a reference member, using a first measurement system having a first head disposed at one of a second movable body and the first movable body and a first scale disposed at the other of the second movable body and the first movable body that can measure a movement range of the first movable body in the first direction at the time of the scanning exposure, the second movable body being disposed between the first movable body and the reference member, and being movable in the second direction; and acquiring position information of the first movable body in the second direction with respect to the reference member, using a second measurement system, having a second head disposed at one of the second movable body and the reference member and a second scale disposed at the other of the second movable body and the reference member, that can measure a movement range of the first movable body in the second direction at the time of scanning exposure. ### Claim 8 (depends on 7) The exposure method according to claim 7, further comprising: controlling a position of the first movable body with respect to the reference member, wherein the first measurement system acquires the position information by the first head measuring the first scale having a measurement component in the second direction, the second measurement system acquires the position information by the second head measuring the second scale having a measurement component in the first direction, and the position of the first movable body with respect to the reference member is controlled, on the basis of position information acquired by the first measurement system and the second measurement system.