# US 2018/0321600 A1 · Movable body apparatus, exposure apparatus, and device manufacturing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0321600 A1 - Document ID: US20180321600A1 - Status: Published application - Kind: A1 - Application number: 16/032,570 - Filed: 2018-07-11 - Published: 2018-11-08 - Earliest claimed: 2013-06-28 - Assignees: Nikon Corporation - Applicants: Nikon Corporation - Inventors: Yuichi SHIBAZAKI - Web page: https://patentgrep.com/patent/US20180321600A1 ## CPC - G03F 7/70716: {Stages} - G03F 7/70758: {Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving} - G03F 7/709: {Vibration, e.g. vibration detection, compensation, suppression or isolation} - G03F 7/70991: {Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum} - H10P 72/50: for positioning, orientation or alignment - H10P 72/7604: {the wafers being placed on a susceptor, stage or support} - H10P 72/7612: {characterised by lifting arrangements, e.g. lift pins} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A supporting member on which a wafer table is mounted is substantially kinematically supported, via six rod members placed on a slider. Further, coupling members are placed facing in a non-contact manner via a predetermined gap, thin plate-shaped edges provided at both ends in the Y-axis direction of the supporting member. By this arrangement, vibration-damping is performed by the coupling members (squeeze dampers) facing the edges, on vibration of the supporting member mounted on the wafer table. Further, because the supporting member is kinematically supported via the plurality of rod members, it becomes possible to reduce deformation of the wafer table that accompanies deformation of the slider. ## Claims ### Claim 1 A movable body apparatus including a movable body on which an object is mounted and which is movable, wherein: the movable body includes: an object mounting section that mounts the object; a slider that is movable with respect to a surface plate; a support member that is capable of supporting the object from below; and a driver that is capable of moving the support member with respect to the object mounting section in a vertical direction, wherein the object mounting section is kinematically supported, and the driver is in a noncontact state with respect to the object mounting section. ### Claim 2 (depends on 1) The movable body apparatus according to claim 1, wherein the support member is a first support member, the apparatus further comprises: a second support member that supports the object mounting section on the slider, wherein the object mounting section is kinematically supported by the second support member being kinematically supported. ### Claim 3 (depends on 2) The movable body apparatus according to claim 2, further comprising: a plurality of rod members connected to the slider, wherein the second support member is kinematically supported via the plurality of rod members. ### Claim 4 (depends on 3) The movable body apparatus according claim 3, wherein the plurality of rod members have rigidities in different directions, respectively. ### Claim 5 (depends on 4) The movable body apparatus according to claim 4, wherein the plurality of rod members include a first rod member having rigidity in a first direction and a second rod member having rigidity in a second direction. ### Claim 6 (depends on 3) The movable body apparatus according to claim 3, wherein at least two rod members of the plurality of rod members are disposed in a state of intersecting each other. ### Claim 7 (depends on 2) The movable body apparatus according to claim 2, further comprising: a vibration-damping section that suppresses vibration of the second support member. ### Claim 8 (depends on 7) The movable body apparatus according to claim 7, wherein the vibration-damping section includes a squeeze film damper. ### Claim 9 (depends on 2) The movable body apparatus according to claim 2, further comprising: a frame member provided at the slider; and a vibration-damping section arranged between the second support member and the frame member. ### Claim 10 (depends on 9) The movable body apparatus according to claim 9, wherein the vibration-damping section includes a squeeze film damper. ### Claim 11 (depends on 9) The movable body apparatus according to claim 9, wherein the vibration-damping section suppresses vibration of the second support member, using a force generated by at least one of a flow and a compression of a fluid located in a gap between the second support member and the frame member. ### Claim 12 (depends on 9) The movable body apparatus according to claim 9, wherein the frame member is in a noncontact state with respect to the second support member. ### Claim 13 (depends on 9) The movable body apparatus according to claim 9, wherein a space is formed between one of the frame member and the second support member, and the object mounting section, and at least a part of the other of the frame member and the second support member is arranged in the space. ### Claim 14 (depends on 9) The movable body apparatus according to claim 9, further comprising: a plurality of rod members that support the second support member, wherein the frame member is connected to the slider at a position different from a position at which the plurality of rod members are connected to the slider. ### Claim 15 (depends on 9) The movable body apparatus according to claim 9, wherein the driver is provided at the frame member. ### Claim 16 (depends on 1) The movable body apparatus according claim 1, wherein the driver is provided at the slider. ### Claim 17 (depends on 1) The movable body apparatus according claim 1, wherein the movable body is movable at least in directions of three degrees of freedom within a predetermined plane that includes a first axis and a second axis orthogonal to each other. ### Claim 18 (depends on 17) The movable body apparatus according to claim 17, further comprising: a planar motor configured to move the movable body with respect to the surface plate, wherein the object is moved with respect to the surface plate only by the planar motor. ### Claim 19 (depends on 18) The movable body apparatus according to claim 18, wherein the planar motor has a magnet unit including a plurality of permanent magnets and a coil unit including a plurality of coils, one of the magnet unit and the coil unit is provided at a lower surface of the slider, and the other of the magnet unit and the coil unit is disposed on the surface plate. ### Claim 20 (depends on 2) The movable body apparatus according to claim 2, wherein the object mounting section is fixed to the second support member. ### Claim 21 The movable body apparatus including a movable body on which an object is mounted and which is movable, wherein the movable body includes: an object mounting section that mounts the object; a slider that is movable with respect to a surface plate; an object supporting member that is capable of supporting the object from below; and a driver that is capable of moving the object supporting member with respect to the object mounting section in a vertical direction, wherein the object mounting section is supported without excessive restraints and without lack of restraint conditions, and the driver is in a noncontact state with respect to the object mounting section. ### Claim 22 (depends on 21) The movable body apparatus according to claim 21, wherein the object mounting section is supported by kinematic support, without excessive restraints and without lack of restraint conditions. ### Claim 23 (depends on 1) An exposure apparatus that exposes an object with an energy beam, the apparatus comprising: the movable body apparatus according to claim 1; and a pattern generating device that generates a pattern on the object by irradiating the object with the energy beam. ### Claim 24 (depends on 23) A device manufacturing method, comprising: exposing an object using the exposure apparatus according to claim 23; and developing the object that has been exposed.