# US 2018/0321569 A1 · Chip scale optical systems

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- Number: US 2018/0321569 A1
- Document ID: US20180321569A1
- Status: Published application
- Kind: A1
- Application number: 15/969,931
- Filed: 2018-05-03
- Published: 2018-11-08
- Earliest claimed: 2017-05-04
- Assignees: The Charles Stark Draper Laboratory, Inc.
- Applicants: The Charles Stark Draper Laboratory, Inc.
- Inventors: Steven Spector; Robin Dawson; Benjamin Lane; Michael G. Moebius
- Web page: https://patentgrep.com/patent/US20180321569A1

## CPC

- G02F 1/218: {using semi-conducting materials}
- G02B 6/12011: {characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section}
- G02B 6/12033: {characterised by means for configuring the device, e.g. moveable element for wavelength tuning (switching G02B6/35; thermo-optic devices G02F1/0147)}
- G02B 6/3546: {NxM switch, i.e. a regular array of switches elements of matrix type constellation}
- G02B 21/0032: {Optical details of illumination, e.g. light-sources, pinholes, beam splitters, slits, fibers (G02B21/0036 - G02B21/008; means for illumination of specimens in general G02B21/06)}
- G02B 21/0056: {based on optical coherence, e.g. phase-contrast arrangements, interference arrangements}
- G02B 21/0076: {arrangements using fluorescence or luminescence}
- G02B 27/58: Optics for apodization or superresolution; Optical synthetic aperture systems
- G02F 1/125: in an optical waveguide structure
- G02F 1/2955: {by controlled diffraction or phased-array beam steering (controlled diffraction for optical waveguide switching G02F1/313)}
- G01N 21/4795: {spatially resolved investigating of object in scattering medium (in vivo A61B)}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)

## Abstract

An optical phased array including a wafer, optical waveguides, a root optical waveguide, the root optical waveguide being optically connected at one end to one optical waveguide, another end of the root optical waveguide constituting an optical port, optical couplers disposed in an array and located on the wafer, the optical waveguides optically connecting the optical couplers to the optical port via respective optical paths, one optical path per optical coupler, configurable optical delay lines; each configurable optical delay line being disposed in one respective optical path from the respective optical paths; the configurable optical delay lines being configured such that the optical couplers emit a non-planar phase front near field radiation pattern from light received from a light source coupled to the optical port.

## Claims

### Claim 1

An optical phased array having a predetermined design wavelength and a predetermined design bandwidth, the optical phased array comprising:
a wafer;
a plurality of optical waveguides; the plurality of optical waveguides being one of implanted in the wafer or disposed on the wafer;
a root optical waveguide, the root optical waveguide being one of implanted in the wafer or disposed on the wafer; the root optical waveguide being optically connected at one end to one optical waveguide from the plurality of optical waveguides; another end of the root optical waveguide constituting an optical port;
a plurality of optical couplers disposed in an array and located on the wafer;
the plurality of optical waveguides optically connecting the plurality of optical couplers to the optical port via respective optical paths, one optical path per optical coupler; and
a plurality of configurable optical delay lines; each configurable optical delay line from the plurality of configurable optical delay lines being disposed in one respective optical path from the respective optical paths; the plurality of configurable optical delay lines being configured such that the plurality of optical couplers emit or receive a non-planar phase front near field radiation pattern; the plurality of optical couplers receiving light from one of a light source coupled to the optical port or propagating optical radiation impinging on at least some of the plurality of optical couplers.

### Claim 2 (depends on 1)

A confocal microscope comprising:
the optical phased array of claim 1 wherein the nonplanar phase front near field radiation pattern is a spherical phase front near field radiation pattern configured to focus light at a predetermined focal point.

### Claim 3 (depends on 1)

An optical component comprising:
the optical phased array of claim 1 wherein the nonplanar phase front near field radiation pattern is configured to bend light in a predetermined pattern.

### Claim 4 (depends on 1)

The optical phased array of claim 1 further comprising a plurality of microlenses, each microlens of the plurality of microlenses being disposed proximate a respective optical coupler of the plurality of optical couplers; each microlens of the plurality of microlenses being offset relative to the respective optical coupler.

### Claim 5 (depends on 1)

The optical phased array of claim 1 wherein at least some of the plurality of configurable optical delay lines comprise interaction with an evanescent field; said at least some of the plurality of configurable optical delay lines comprising a MEMS actuator configured to move a membrane close to a waveguide in order to interact with an evanescent field of light in the waveguide, modifying propagation properties.

### Claim 6 (depends on 1)

The optical phased array of claim 1 wherein at least some of the plurality of configurable optical delay lines comprise a combination of optical waveguides and optical switches.

### Claim 7 (depends on 1)

The optical phased array of claim 1 further comprising one or more processors operatively connected to the plurality of configurable optical delay lines; the one or more processors being configured to provide inputs to each reconfigurable optical delay line from the plurality of configurable optical delay lines such that the plurality of configurable optical delay lines is configured such that the optical couplers emit a predetermined nonplanar phase front near field radiation pattern when the optical couplers receiving light from a light source coupled to the optical port.

### Claim 8 (depends on 7)

The optical phased array of claim 7 further comprising one or more MEMS devices operatively connected to the wafer; and wherein the one or more processors are also configured to provide inputs to the one or more MEMS devices were in the inputs are configured to tilt the phase front.

### Claim 9 (depends on 1)

The optical phased array of claim 1 further comprising a three port optical component wherein a first port is operatively connected to the optical port and the second and third port being optically connected to the first port; the second report being configured to receive input light; the third port being configured to provide output light.

### Claim 10 (depends on 9)

The optical phased array of claim 9 wherein the second and third port are optically connected to the first port by an optical splitter.

### Claim 11 (depends on 9)

The optical phased array of claim 9 wherein the second and third port are optically connected to the first port by an optical switch.

### Claim 12 (depends on 11)

The optical phased array of claim 11 wherein the optical switch comprises a modulator.

### Claim 13 (depends on 9)

The optical phased array of claim 9 wherein the second and third port are optically connected to the first port by an optical circulator.

### Claim 14 (depends on 9)

The optical phased array of claim 9 wherein the second and third port are optically connected to the first port by a configurable optical filter.

### Claim 15 (depends on 9)

The optical phased array of claim 9 wherein the second and third port are optically connected to the first port by at least one of an optical splitter, an optical switch, a circulator and a configurable optical filter.

### Claim 16 (depends on 9)

The optical phased array of claim 9 wherein the third port is optically connected to a spectrometer.

### Claim 17 (depends on 7)

The optical phased array of claim 7 further comprising a three port optical component wherein a first port is operatively connected to the optical port and the second and third port being optically connected to the first port; the second report being configured to receive input light; the third port being configured to provide output light; wherein the third port is optically connected to a detector; and wherein an output on the detector is operatively connected to the processor.

### Claim 18 (depends on 17)

The optical phased array of claim 17 wherein the processor is further configured to:
determine, from the output of the detector, beam spot quality for the light received by the plurality of optical couplers from a turbid scattering medium; and
determine the configuration of the plurality of the configurable optical delay lines that results in a phase front that counteracts scattering.

### Claim 19 (depends on 7)

The optical phased array of claim 7 wherein the nonplanar phase front near field radiation pattern is configured to image light at a predetermined focal point when a light source is coupled to the optical port; and
wherein the processor is further configured to:
a) determine, from an output of a detector coupled to the optical port, beam spot quality for light received by the plurality of optical couplers from a field of view in turbid scattering medium; and
b) determine a configuration of the plurality of the configurable optical delay lines that results in a phase front that counteracts scattering.

### Claim 20 (depends on 19)

The optical phased array of claim 19 wherein the processor is further configured to repeat steps (a) and (b) in order to obtain a larger total power collected.

### Claim 21

A method for imaging light at a predetermined spot,
optically coupling a light source to an optical port in an optical phased array, the optical phased array comprising:
a plurality of optical waveguides;
a root optical waveguide optically connected at one end to one optical waveguide from the plurality of optical waveguides; another end of the root optical waveguide constituting the optical port;
a plurality of optical couplers disposed in an array; the plurality of optical waveguides optically connecting the plurality of optical couplers to the optical port via respective optical paths, one optical path per optical coupler; and
a plurality of configurable optical delay lines; each configurable optical delay line from the plurality of configurable optical delay lines being disposed in one respective optical path from the respective optical paths;
the plurality of configurable optical delay lines being configured such that the plurality of optical couplers emit a non-planar phase front near field radiation pattern; the non-planar phase front near field radiation pattern configured to focus emitted light onto the predetermined spot.

### Claim 22 (depends on 21)

The method of claim 21 wherein the nonplanar phase front near field radiation pattern is a spherical phase front radiation pattern.

### Claim 23

A method for receiving light from a predetermined spot, the method comprising:
receiving light at a plurality of optical couplers in an optical phased array, the optical phased array comprising:
a plurality of optical waveguides;
a root optical waveguide optically connected at one end to one optical waveguide from the plurality of optical waveguides; another end of the root optical waveguide constituting an optical port;
the plurality of optical couplers disposed in an array; the plurality of optical waveguides optically connecting the plurality of optical couplers to the optical port via respective optical paths, one optical path per optical coupler; and
a plurality of configurable optical delay lines; each configurable optical delay line from the plurality of configurable optical delay lines being disposed in one respective optical path from the respective optical paths;
the plurality of configurable optical delay lines being configured such that the plurality of optical couplers receive a non-planar phase front near field radiation pattern; the non-planar phase front near field radiation pattern configured to image light onto the predetermined spot when the optical couplers are receiving light from a light source coupled to the optical port.

### Claim 24 (depends on 23)

The method of claim 23 wherein the nonplanar phase front near field radiation pattern is a spherical phase front radiation pattern.

### Claim 25 (depends on 23)

The method of claim 23 wherein the predetermined spot is located in a turbid scattering medium; and wherein the method further comprises:
optically coupling the optical port to a detector;
a) determining, from an output of the detector coupled to the optical port, beam spot quality for light received by the plurality of optical couplers from a field of view in the turbid scattering medium; and
b) determining a configuration of the plurality of the configurable optical delay lines that results in a phase front that counteracts scattering.

### Claim 26 (depends on 25)

The method of claim 25 further comprising repeating little steps (a) and (b) in order to obtain a larger total power collected.
