# US 2018/0320913 A1 · Humid air forming device, inspection device comprising same, and inspection method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2018/0320913 A1 - Document ID: US20180320913A1 - Status: Published application - Kind: A1 - Application number: 15/735,016 - Filed: 2016-06-08 - Published: 2018-11-08 - Earliest claimed: 2015-06-08 - Assignees: Koh Young Technology Inc. - Applicants: Koh Young Technology Inc. - Inventors: Jang Il SER; Hyo Bin KIM; Yong Seung SHIN; Hong Ki KIM; Ho Jun LEE - Web page: https://patentgrep.com/patent/US20180320913A1 ## CPC - F24F 6/12: by forming water dispersions in the air - B01F 23/12: {with vaporisation of a liquid (disinfection, sterilisation or deodorisation of air A61L9/00)} - B01F 25/31425: {with a plurality of perforations in the axial and circumferential direction covering the whole surface} - B01L 1/04: Dust-free rooms or enclosures - F25B 21/02: using Peltier effect; using Nernst-Ettinghausen effect - F25B 41/00: Fluid-circulation arrangements - G01B 11/25: by projecting a pattern, e.g. {one or more lines,} moiré fringes on the object (G01B11/255 takes precedence {; image analysis for depth or shape recovery G06T7/50}) - G01B 11/2513: {with several lines being projected in more than one direction, e.g. grids, patterns} - G01N 21/958: Inspecting transparent materials {or objects, e.g. windscreens (for conveyed flat sheet or rod G01N21/896)} - B01L 2200/147: Employing temperature sensors - B01L 2300/024: Storing results with means integrated into the container - B01L 2300/10: Means to control humidity and/or other gases - B01L 2300/18: Means for temperature control - B01L 2300/1894: Cooling means; Cryo cooling - F28C 3/08: with change of state, e.g. absorption, evaporation, condensation (generating steam under pressure F22) - G01N 2021/845: {Objects on a conveyor} - F24F: AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING (removing dirt or fumes from areas where they are produced B08B15/00; vertical ducts for carrying away waste gases from buildings E04F17/02; tops for chimneys or ventilating shafts, terminals for flues F23L17/02) - B01F: MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING (mixing paints B44D3/06) - B01L: CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE - F25B: REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS - G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - F28C: HEAT-EXCHANGE APPARATUS, NOT PROVIDED FOR IN ANOTHER SUBCLASS, IN WHICH THE HEAT-EXCHANGE MEDIA COME INTO DIRECT CONTACT WITHOUT CHEMICAL INTERACTION (safety devices in general F16P; fluid heaters having heat generating means F24H; with an intermediate heat-transfer medium coming into direct contact with heat-exchange media F28D15/00 - F28D19/00; details of heat-exchange apparatus of general application F28F) ## Abstract A humid air forming device, which cools an object to be measured to a predetermined temperature, and which sprays humid air having a predetermined temperature to the cooled object to be measured, thereby forming moisture particles on the surface of the object to be measured, and a measurement system including the same. The humid air forming device includes a cooling unit that cools the object to be measured to a first temperature or lower; and a humid air supply unit that forms humid air having a second temperature, which is higher than the first temperature, and spraying the humid air toward the surface of the cooled object to be measured, thereby forming moisture particles on the surface of the cooled object to be measured. ## Claims ### Claim 1 A humid air forming device comprising: a humid air supply unit configured to form humid air by mixing hot air having a temperature that is higher than a temperature of a measurement object with moisture, to spray the humid air to a surface of the measurement object, and to form moisture particles on the surface of the measurement object. ### Claim 2 (depends on 1) The humid air forming device of claim 1, further comprising: a cooling unit configured to cool the measurement object. ### Claim 3 (depends on 2) The humid air forming device of claim 2, wherein the cooling unit includes: a measurement object loading unit configured to load a plurality of measurement objects thereon; a cold air forming unit configured to form cold air; and a cold air supply pipe configured to connect the measurement object loading unit and the cold air forming unit, and to supply the cold air formed in the cold air forming unit into the measurement object loading unit. ### Claim 4 (depends on 3) The humid air forming device of claim 3, wherein the cooling unit further includes a cold air circulation pipe configured to connect the measurement object loading unit and the cold air forming unit and to circulate the cold air supplied to the measurement object loading unit to the cold air forming unit. ### Claim 5 (depends on 1) The humid air forming device of claim 1, wherein the humid air supply unit includes: a hot air forming unit configured to form hot air; a humidifying unit configured to form the moisture; and a mixing unit configured to form the humid air by mixing the hot air and the moisture. ### Claim 6 (depends on 5) The humid air forming device of claim 5, wherein the mixing unit includes: a case including a first inlet, into which the hot air flows, a second inlet, into which the moisture flows, and a discharge port through which the humid air is discharged; and a mixing pipe configured to have a plurality of through holes, through which the moisture that flows from the second inlet passes and to be connected with the first inlet and the discharge port, and to form the humid air by mixing the hot air that flows from the first inlet and the moisture passing through the through holes. ### Claim 7 (depends on 1) The humid air forming device of claim 1, further comprising: a cooling base configured to cool and hold the measurement object, onto which the humid air is sprayed. ### Claim 8 (depends on 7) The humid air forming device of claim 7, wherein the cooling base includes: a cooling element configured to cool the measurement object; an upper plate installed above the cooling element, and configured to suck and hold the measurement object and to transfer heat of the measurement object to the cooling element; and a lower plate installed below the cooling element and configured to dissipate heat generated from the cooling element. ### Claim 9 (depends on 8) The humid air forming device of claim 8, wherein the cooling base further includes a suction unit configured to suck air through a plurality of perforations such that the measurement object is sucked and held on the upper plate. ### Claim 10 (depends on 1) The humid air forming device of claim 1, wherein the humid air supply unit includes: a wind path configured to circulate the humid air therein in a closed manner; a humidifying unit configured to generate the moisture to be mixed with the humid air; and an air spraying unit configured to spray a part of the humid air circulating in the wind path onto the measurement object. ### Claim 11 (depends on 10) The humid air forming device of claim 10, wherein the humid air supply unit further includes a heater configured to heat the humid air circulating in the wind path to a temperature higher than a temperature of external air. ### Claim 12 (depends on 10) The humid air forming device of claim 10, wherein the humid air supply unit further includes a mixing unit configured to mix the humid air and the moisture formed by the humidifying unit. ### Claim 13 (depends on 10) The humid air forming device of claim 10, wherein the humid air supply unit further includes an opening/closing unit configured to supply a part of the humid air, which is confined in the wind path, to the air spraying unit or to block the supply of the part of the humid air. ### Claim 14 (depends on 10) The humid air forming device of claim 10, wherein the humid air supply unit further includes a humid air buffer unit configured to receive and store a part of the humid air, which is confined in the wind path, and to supply the stored humid air to the wind path. ### Claim 15 (depends on 10) The humid air forming device of claim 10, wherein the humid air supply unit further includes an air circulation unit configured to circulate the humid air in the wind path. ### Claim 16 (depends on 11) The humid air forming device of claim 11, wherein the humid air supply unit further includes a humid air sensing unit configured to sense a temperature and a humidity of the humid air, the humid air forming device further includes a controller configured to control formation and spraying of the humid air, and the controller controls driving of the heater and the humidifying unit based on the sensed temperature and humidity. ### Claim 17 (depends on 11) The humid air forming device of claim 11, further comprising: a controller configured to control formation and spraying of the humid air, wherein the controller controls driving of the heater and the humidifying unit based on whether or not the air spraying unit is driven, or based on a number of times of driving of the air spraying unit. ### Claim 18 An inspection device comprising: a humid air forming device comprising a humid air supply unit configured to form humid air by mixing hot air having a temperature that is higher than a temperature of a measurement object and moisture, to spray the humid air onto a surface of the measurement object, and to form moisture particles on the surface of the measurement object; and an image data acquisition unit configured to irradiate light to the measurement object, onto which the humid air is sprayed, to receive light reflected from the measurement object and to acquire image data of the measurement object, in order to inspect the measurement object. ### Claim 19 (depends on 18) The inspection device of claim 18, wherein the humid air forming device further includes a cooling unit configured to cool the measurement object. ### Claim 20 An inspection method performed by an inspection device, the method comprising: forming humid air by mixing hot air having a temperature higher than a temperature of a measurement object and moisture; forming moisture particles on a surface of the measurement object by spraying the humid air onto the surface of the measurement object; and acquiring image data by measuring the measurement object, on which the moisture particles are formed, in order to inspect the measurement object.