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US 2018/0315572 A1Published application
Current handling in legs and anchors of rf-switch
AssigneeCavendish Kinetics, Inc.
InventorsRobertus Petrus VAN KAMPEN, Richard L. KNIPE
Life of this patent
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Abstract
The present invention generally relates to a mechanism for making the anchor of the MEMS switch more robust for current handling.
Claims20
A MEMS device, comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes includes at least an anchor electrode, a pull-down electrode and an RF electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element includes a first anchor portion, a first leg portion and a bridge portion, wherein the plurality of vias are disposed in the anchor portion and the bridge portion, wherein the anchor portion is coupled to the anchor electrode.
4 more elements
A MEMS device, comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes includes at least an anchor electrode, a pull-down electrode and an RF electrode;
- an anchor contact disposed on the anchor electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element is enclosed in a cavity;
- and
- a cavity sidewall in contact with the bottom layer, top layer, and anchor contact, wherein the cavity sidewall is electrically coupled to the bottom layer, top layer and anchor contact.
7 more elements
A MEMS device, comprising:
- a substrate having a plurality of electrodes disposed therein, wherein the plurality of electrodes includes at least an anchor electrode, a pull-down electrode and an RF electrode;
- an anchor contact disposed on the anchor electrode;
- an insulating layer disposed over the substrate and the pull-down electrode;
- a switching element movable from a position spaced a first distance from the RF electrode and a second distance from the RF electrode that is different from the first distance, wherein the switching element includes:
- a bottom layer;
- a top layer;
- and
- a plurality of vias connecting the bottom layer to the top layer, wherein the switching element includes a first anchor portion, a first leg portion and a bridge portion, wherein the plurality of vias are disposed in the anchor portion and the bridge portion, wherein the anchor portion is coupled to the anchor electrode;
- and
- a cavity sidewall in contact with the bottom layer, top layer, and anchor contact, wherein the cavity sidewall is electrically coupled to the bottom layer, top layer and anchor contact.
7 more elements
Dependencies are inferred from the claim text.