Heat-reactive resist material, mold manufacturing method, mold, development method and pattern formation material
AssigneeAsahi Kasei E-Materials Corporation
InventorsYoshimichi MITAMURA, Takuto NAKATA
Life of this patent
Estimating the term…
Abstract
A heat-reactive resist material contains copper oxide, and silicon or silicon oxide, and is formed so that the content of silicon or silicon oxide in the heat-reactive resist material is 4.0 mol % or more less than 10.0 mol % in terms of mole of silicon. A heat-reactive resist layer is formed using the heat-reactive resist material, is exposed, and then, is developed with a developing solution. Using the obtained heat-reactive resist layer as a mask, dry etching is performed on a substrate with a fluorocarbon to manufacture a mold having a concavo-convex shape on the substrate surface. At this point, it is possible to control a fine pattern comprised of the concavo-convex shape.
Claims3
A pattern formation material comprising a combination of a heat-reactive resist material and a developing solution, wherein
- the heat-reactive resist material contains copper oxide, and silicon or silicon oxide,
- the developing solution comprises glycine solution or a mixed solution of glycine and ammonium oxalate, and
- a Si additive amount of the silicon or the silicon oxide in the heat-reactive resist material ranges from 4.5 mol % to 9.5 mol % in the total moles of copper (Cu) and silicon (Si).
Dependencies are inferred from the claim text.