Production apparatus and production method for fine particles

A production apparatus for fine particles comprising:

• a vacuum chamber;
• a material supply device connected to the vacuum chamber and supplying material particles;
• plural electrodes connected to the vacuum chamber and generating plasma by arc discharge in a state where tip ends protrude into the vacuum chamber;
• AC power sources connected to respective electrodes;
• and
• a collection device connected to the vacuum chamber and collecting fine particles, which generates the arc discharge inside the vacuum chamber and produces fine particles from the material particles,
• wherein plural material supply ports of the material supply device that supply a material gas containing the material particles are arranged below the plural electrodes in a vertical direction inside the vacuum chamber, and
• a first gas supply port that supplies a first gas is arranged in an inner periphery of the plural material supply ports of the material supply device and plural second gas supply ports that supply a second gas are arranged in an outer periphery of the plural material supply ports.