Method for protecting a mems unit against infrared investigations and mems unit
AssigneeRobert Bosch GmbH
InventorsMichael Curcic, Oliver Willers, Sven Zinober, Ulrich Kunz
Life of this patent
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Abstract
A method is provided for protecting a MEMS unit against infrared investigations, at least one layer being built into the structure of the MEMS unit or at least one layer being applied on a surface of the MEMS unit. The at least one layer absorbs, reflects or diffusely scatters more than 50%, in particular more than 90% of an infrared light incident upon it.
Claims12
A method for protecting a MEMS unit against infrared investigations, the method comprising:
- one of:
- (i) building at least one layer into a structure of the MEMS unit, or (ii) applying at least one layer onto a surface of the MEMS unit;
- and
- one of absorbing, reflecting or diffusely scattering, more than 50% of an infrared light incident on the at least one layer.
A MEMS unit, including at least one of a built-in or applied layer, the layer to one of absorb, reflect or diffusely scatter more than 50% of an irradiated infrared light.
Dependencies are inferred from the claim text.