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US 2018/0297837 A1Published application
Method for protecting a mems unit against infrared investigations and mems unit
AssigneeRobert Bosch GmbH
InventorsMichael Curcic, Oliver Willers, Sven Zinober, Ulrich Kunz
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Abstract
A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.
Claims15
A method for protecting a MEMS unit against infrared investigations, comprising:
- doping at least one area of MEMS unit, the at least one doped area one of absorbing, reflecting or diffusely scattering more than 50% of an infrared light incident upon it.
A MEMS unit having at least one doped area, which one of absorbs, reflects or diffusely scatters more than 50% of an irradiated infrared light.
Dependencies are inferred from the claim text.