Method for manufacturing organic el apparatus, organic el apparatus, and electronic device
AssigneeSeiko Epson Corporation
InventorYuki HANAMURA
Life of this patent
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Abstract
A method for manufacturing an organic EL apparatus includes forming an organic EL element and a mounting terminal on a substrate of an element substrate as a first substrate, forming sealing films so as to cover at least the organic EL element and the mounting terminal, adhering a sealing substrate as a second substrate with respect to the element substrate using a filler, and etching the sealing films so as to expose at least a part of the mounting terminal, in which, in the etching of the sealing films, the second substrate, which is formed with a composition which reacts with an etching gas and vaporizes, or a protective member, which covers at least a part of the second substrate, is used as a mask.
Claims8
A method for manufacturing an organic EL apparatus, the method comprising:
- forming an organic EL element and a mounting terminal above a first substrate;
- forming a sealing film from silicon oxynitride film so as to cover at least the organic EL element and the mounting terminal;
- adhering a second substrate with respect to the first substrate using a filler;
- and
- etching the sealing film so as to expose at least a part of the mounting terminal,
- wherein, in the etching of the sealing film, the second substrate made of quartz glass is used as a mask.
A method for manufacturing an organic EL apparatus, the method comprising:
- forming an organic EL element and a mounting terminal above a first substrate;
- forming a first sealing film from silicon oxynitride film so as to cover at least the organic EL element and the mounting terminal;
- forming a buffering film on the first sealing film;
- forming a second sealing film from silicon oxynitride film so as to cover the buffering film and the mounting terminal;
- adhering a second substrate with respect to the first substrate using a filler;
- and
- etching the first sealing film and the second sealing film so as to expose at least a part of the mounting terminal,
- wherein, in the etching of the first sealing film and the second sealing film, the second substrate made of quartz glass is used as a mask.
- the sealing film has a silicon oxynitride film as a main component, and the second substrate is quartz glass.
A method for manufacturing an organic EL apparatus, the method comprising:
- forming an organic EL element and a mounting terminal above a first substrate;
- forming a sealing film so as to cover at least the organic EL element and the mounting terminal;
- forming a color filter, which has a plurality of colored layer, on the sealing film;
- coating a filler so as to cover the plurality of colored layer;
- adhering a second substrate with respect to the first substrate using the filler;
- and
- etching the sealing film so as to expose at least a part of the mounting terminal,
- wherein, in the etching of the sealing film, the second substrate made of quartz glass is used as a mask.
Dependencies are inferred from the claim text.