Thin film transistors and the manufacturing methods thereof, and array substrates

An array substrate, comprising:

• a substrate;
• a gate on the substrate;
• a gate insulation layer on the substrate and the gate, and a surface of the gate insulation layer being applied with a flattening process;
• an oxygen-rich layer on the gate insulation layer;
• an active layer on the oxygen-rich layer;
• a source and a drain on the active layer;
• a passivation layer on the active layer, the source, and the drain;
• a pixel electrode on the passivation layer having a through hole exposing the drain, and the pixel electrode connects to the drain via the through hole.

A manufacturing method of TFTs, comprising:

• providing a substrate;
• forming a gate on the substrate;
• forming a gate insulation layer on the substrate and the gate, and applying a flattening process to a surface of the gate insulation layer;
• forming an oxygen-rich layer on the gate insulation layer;
• forming an active layer on the oxygen-rich layer;
• forming a source and a drain on the active layer;
• forming a passivation layer on the source, the drain, and the active layer.