Method and system for mom capacitance value control

A system for MOM capacitance value control. The system comprises:

• a storage module for storing target thicknesses for all metal layers;
• a measurement module for measuring a thickness of a current metal layer after forming the current metal layer;
• a determination module for outputting a calculation signal when the thickness of the current metal layer is equal to or less than a threshold value or outputting a rework signal when the thickness of the current metal layer is greater than the threshold value;
• a calculation module for responding to the calculation signal to calculate multiple capacitance variations related to the current metal layer according to the thickness of the current metal layer;
• wherein each of the capacitance variation related to the current metal layer is between an actual capacitance value of a MOM capacitor combination associated with the current metal layer and a target capacitance value of the same MOM capacitor combination;
• the calculation module further calculates updated target thicknesses for all subsequent metal layers according to the capacitance variations related to the current metal layer to reduce total variations between the actual capacitance values of the MOM capacitor combinations associated with the current metal layer and the target capacitance values of the same MOM capacitor combinations.