Back to results
US 2018/0294232 A1Published application
Microchip charge patterning
AssigneePalo Alto Research Center Incorporated
InventorsEugene M. Chow, JenPing Lu, Armin R. Volkel, Bing R. Hsieh, Gregory L. Whiting, Sean E. Doris
Life of this patent
Estimating the term…
Abstract
A method of forming a charge pattern on a microchip includes depositing a material on the surface of the microchip, and immersing the microchip in a fluid to develop charge in or on the material through interaction with the surrounding fluid.
Claims20
A method of forming a charge pattern on a microchip, comprising:
- depositing a material on the surface of the microchip;
- and
- immersing the microchip in a non-polar solution to develop charge in or on the material through interaction with the surrounding non-polar solution.
A method of forming a charge pattern on a microchip, comprising:
- depositing an oxide on an insulator surface of the microchip;
- depositing a self-assembled monolayer on the oxide material on the insulator surface of the microchip;
- patterning the self-assembled monolayer to reveal a portion of the oxide;
- and
- immersing the microchip in fluid to develop charges on at least of the oxide or the self-assembled monolayer through dissociation of surface molecules of the oxide and the self-assembled monolayer.
2 more elements
A method of forming a charge pattern on a microchip, comprising:
- depositing an oxide on an insulator surface of the microchip;
- patterning a sacrificial blocking material onto a portion of the oxide;
- depositing a self-assembled monolayer on the oxide material on the insulator surface of the microchip and the sacrificial blocking material;
- removing the sacrificial blocking material after depositing the self-assembled monolayer to reveal the oxide;
- and
- immersing the microchip in fluid to develop charges on the oxide and the self-assembled monolayer through dissociation of surface molecules of at least one of the oxide and the self-assembled monolayer.
3 more elements
Dependencies are inferred from the claim text.