Semiconductor device
AssigneeRenesas Electronics Corporation
InventorsKoujirou MATSUI, Takehiko SAKAMOTO, Kazuyuki UMEZU, Tomoaki UNO
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AssigneeRenesas Electronics Corporation
InventorsKoujirou MATSUI, Takehiko SAKAMOTO, Kazuyuki UMEZU, Tomoaki UNO
Estimating the term…
A plurality of unit MISFET elements connected in parallel with each other to make up a power MISFET are formed in an LDMOSFET forming region on a main surface of a semiconductor substrate. A control circuit that controls a gate voltage of the power MISFET is formed in a driver circuit region on the main surface of the semiconductor substrate. A wiring structure having a plurality of wiring layers made of the same metal material is formed on the semiconductor substrate. The gate electrodes of the plurality of unit MISFET elements formed in the LDMOSFET forming region are electrically connected to each other via gate wirings formed in all of the plurality of wiring layers made of the same metal material.
1-5. (canceled)
A semiconductor device comprising:
Dependencies are inferred from the claim text.