Back to results
US 2018/0294176 A1Published application
Movable structure and film forming apparatus
AssigneeTokyo Electron Limited
InventorManabu NAKAGAWASAI
Life of this patent
Estimating the term…
Abstract
A movable structure includes a processing chamber configured to perform processing under a vacuum environment; a fixed portion disposed in the processing chamber; a movable portion that is movable with respect to the fixed portion; a transmission/reception module provided at the fixed portion and having a hermetically sealed structure; and a sensor module provided at the movable portion and having a hermetically sealed structure. The transmission/reception module and the sensor module perform transmission and reception of signals in a non-contact manner.
Claims12
A movable structure comprising:
- a processing chamber configured to perform processing under a vacuum environment;
- a fixed portion disposed in the processing chamber;
- a movable portion that is movable with respect to the fixed portion;
- a transmission/reception module provided at the fixed portion and having a hermetically sealed structure;
- and
- a sensor module provided at the movable portion and having a hermetically sealed structure,
- wherein the transmission/reception module and the sensor module perform transmission and reception of signals in a non-contact manner.
4 more elements
Dependencies are inferred from the claim text.