Adaptive Periodic Waveform Controller
AssigneeMKS Instruments, Inc.
InventorsLarry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
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AssigneeMKS Instruments, Inc.
InventorsLarry J. FISK, II, Aaron T. RADOMSKI, Jonathan W. SMYKA
Estimating the term…
A repeating setpoint generator module selectively varies a setpoint for an output parameter according to a predetermined pattern that repeats during successive time intervals. A closed-loop module, during a first one of the time intervals, generates N closed-loop values based on N differences between (i) N values of the setpoint at N times during the first one of the time intervals and (ii) N measurements of the output parameter at the N times during the first one of the time intervals, respectively. An adjusting module, during the first one of the time intervals, generates N adjustment values based on N differences between (i) N values of the setpoint at the N times during a second one of the time intervals and (ii) N measurements of the output parameter at the N times during the second one of the time intervals, respectively.
A method of generating an output power, the method comprising:
A method of generating an output power, the method comprising:
Dependencies are inferred from the claim text.