Nanoelectromechanical devices with metal-to-metal contacts
OwnerKwame Amponsahinventor
Life of this patent
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Abstract
Nanoelectromechanical systems (NEMS) devices/switches and methods for implementing and fabricating the same with conducting contacts are provided. A nanoelectromechanical system (NEMS) switch can include a substrate; a source cantilever formed over the substrate and configured to move relative to the substrate; a drain electrode and at least one gate electrode formed over the substrate; wherein the source cantilever, drain and gate electrodes comprises a metal layer affixed to a support layer, at least a portion of the metal layer at the contact area extending past the support layer; and an interlayer sandwiched between the support layer and substrate.
Claims18
A nanoelectromechanical system (NEMS) switch comprising:
- a substrate;
- a source cantilever formed over the substrate and configured to move relative to the substrate;
- a drain electrode and at least one gate electrode formed over the substrate, wherein the source cantilever, the drain, and the at least one gate electrode comprises a metal layer affixed to a support layer, at least a portion of the metal layer at a contact area between the metal layer and support layer extending past the support layer;
- and
- an interlayer sandwiched between the support layer and the substrate.
A nanoelectromechanical system (NEMS) switch comprising:
- a substrate;
- a source cantilever formed over the substrate and configured to move relative to the substrate;
- a drain electrode and at least one gate electrode formed over the substrate, wherein the source cantilever, the drain, and the at least one gate electrode comprises a metal layer;
- and
- an interlayer sandwiched between the metal layer and the substrate.
The NEMS switch of 12, wherein said interlayer is an insulator.
A method of operating a NEMS switch, the method comprising the steps of:
- applying voltage potentials to a first gate electrode;
- determining the first gate electrode's voltage that causes a source cantilever of the NEMS switch to contact a drain electrode of the NEMS switch;
- pre-biasing the NEMS switch by applying a voltage to the first gate whereby the pre-biased voltage is less than the gate voltage required to bring the source cantilever in contact with the drain electrode;
- applying a voltage on a second gate electrode to bring the source cantilever into contact with the drain electrode;
- and
- transferring a signal between the source cantilever and the drain electrode.
Dependencies are inferred from the claim text.