Sidewall Guided Directed Self Assembly Data Storage Medium
AssigneeSeagate Technology LLC
InventorsAustin P. Lane, Xiaomin Yang, ShuaiGang Xiao, Kim Yang Lee, David S. Kuo
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Abstract
A data storage medium may have increased data capacity by being configured with first and second patterned pedestals that are each separated from a substrate by a seed layer. A first polymer brush layer can be positioned between the first and second patterned pedestals atop the seed layer and a second polymer brush layer may be positioned atop each patterned pedestal. The first and second polymer brush layers may be chemically different and a block copolymer can be deposited to self-assemble into separate magnetic domains aligned with either the first or second polymer brush layers.
Claims20
An apparatus comprising first and second patterned pedestals each separated from a substrate by a seed layer, a first polymer brush layer positioned between the first and second patterned pedestals atop the seed layer, a second polymer brush layer positioned atop each patterned pedestal, the first and second polymer brush layers being chemically different, a block copolymer self-assembling into separate magnetic domains aligned with either the first or second polymer brush layers.
A method comprising:
- depositing a seed layer on a substrate;
- forming an imprint layer atop the seed layer;
- patterning the imprint layer to form first and second patterned pedestals;
- deposit a non-magnetic material between the first and second patterned pedestals;
- create a first polymer brush layer atop each patterned pedestal and the non-magnetic material;
- remove the non-magnetic material and portions of the first polymer brush layer contacting the non-magnetic material to separate the first polymer brush layer into portions positioned on an elevated surface of each patterned pedestal;
- and
- deposit a second polymer brush layer atop the seed layer, the second polymer brush layer grafting to the material of the seed layer to position the second polymer layer only between the patterned pedestals.
A method comprising:
- depositing a seed layer on a substrate;
- forming an imprint layer atop the seed layer;
- patterning the imprint layer to form first and second patterned pedestals;
- deposit a non-magnetic material between the first and second patterned pedestals;
- create a first polymer brush layer atop each patterned pedestal and the non-magnetic material;
- remove the non-magnetic material and portions of the first polymer brush layer contacting the non-magnetic material with a buffered oxide etch to separate the first polymer brush layer into portions positioned on an elevated surface of each patterned pedestal;
- deposit a second polymer brush layer atop the seed layer, the second polymer brush layer grafting to the material of the seed layer to position the second polymer layer only between the patterned pedestals;
- deposit a silicon containing block copolymer material onto the first and second polymer brush layers;
- and
- annealing the block copolymer to self-assemble a plurality of separate magnetic domains aligned with either the first or second polymer brush layers.
Dependencies are inferred from the claim text.