Single crystal production apparatus and single crystal producing method
OwnerShin AKUTSUinventor
Life of this patent
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Abstract
To provide a single crystal production apparatus capable of efficiently producing a single crystal of relatively high quality, by cooling a melting zone, the device including: a heating part that forms the melting zone from a raw material by irradiation of light; and a supporting part that supports the melting zone in a non-contact manner.
Claims7
A single crystal production apparatus that produces a single crystal by cooling a melting zone, comprising:
- a raw material grip portion that grips a raw material;
- and
- a seed crystal grip portion that grips a seed crystal;
- a heating part that forms the melting zone from the raw material by irradiation of light;
- and
- an induction coil disposed around the melting zone and supporting the melting zone in a non-contact manner,
- wherein the seed crystal grip portion is disposed at a vertically top position, and the raw material grip portion is disposed at a vertically bottom position, and
- a diameter of the induction coil is configured so as to become smaller from the vertically top direction to the vertically bottom direction.
A single crystal production apparatus that produces a single crystal by cooling a melting zone, comprising:
- a raw material grip portion that grips a raw material;
- and
- a seed crystal grip portion that grips a seed crystal;
- a heating part that forms the melting zone from the raw material by irradiation of light;
- and
- an induction coil disposed around the melting zone and supporting the melting zone in a non-contact manner,
- wherein the seed crystal grip portion is disposed at a vertically bottom position, and the raw material grip portion is disposed at a vertically top position, and
- a diameter of the induction coil becomes smaller from the vertically top direction to the vertically bottom direction.
A single crystal producing method for producing a single crystal by cooling a melting zone, comprising:
- arranging an induction coil around the melting zone formed from a raw material by irradiation of light in a state of gripping a seed crystal at a vertically top position and gripping the raw material at a vertically bottom position, so that a diameter becomes smaller from the vertically top direction to the vertically bottom direction;
- and
- supporting the melting zone by the induction coil in a non-contact manner.
A single crystal producing method for producing a single crystal by cooling a melting zone, comprising:
- arranging an induction coil around the melting zone formed from a raw material by irradiation of light in a state of gripping a seed crystal at a position in a vertically bottom direction and gripping the raw material at a vertically top position, so that a diameter becomes smaller from the vertically top direction to the vertically bottom direction;
- and
- supporting the melting zone by the induction coil in a non-contact manner.
Dependencies are inferred from the claim text.