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US 2018/0238720 A1Published application
Methods for fabricating an apparatus having a hermetic seal
AssigneeDunan Sensing, LLC
InventorTOM T NGUYEN
Life of this patent
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Abstract
Apparatus and Methods for fabricating apparatus having a hermetic seal to seal a portion of an apparatus, for example and without limitation, a portion having a MEMS sensor. One such method uses crimping devices to compress a seal in a cavity formed in a housing that includes a MEMS sensor attached to a stress isolator. Under such compression, the seal deforms to hermetically seal surfaces around the inside, outside and bottom of the stress isolator.
Claims20
A method of sealing a sensor to a housing comprising:
- providing a housing with a top and a bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity with a first inner wall, a first outer wall and a first cavity bottom and wherein the housing further comprises a second cavity with a second inner wall, a second outer wall and a second cavity bottom and both the first cavity and the second cavity extend down into the housing from the top and surround the hole wherein the first outer wall of the first cavity is the second inner wall of the second cavity;
- providing a seal with a toroidal shape with an open seal top;
- pressing the seal inside the first cavity such that a seal bottom is pressed against the first cavity bottom;
- providing an isolation member coupled to the sensor;
- placing the isolation member down into the first cavity such that the isolation member extends down into the open top of the seal;
- placing a collar down into the second cavity;
- and
- pressing the collar down such that the collar deforms the second inner wall of the second cavity and seals the housing to the isolation member.
5 more elements
A method of sealing a sensor to a housing comprising:
- providing a housing with a top and a bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity that extends down into the housing from the top and surrounds the hole and has a cavity bottom and wherein the housing further comprises a protrusion that surrounds the hole and extends up from the cavity bottom into the first cavity and wherein the housing further comprises a second cavity that extends down into the housing from the top and surrounds, and is coaxial with, the first cavity;
- placing a seal with a toroidal shape with an open top down into the bottom of the first cavity wherein the seal surrounds the protrusion;
- placing an isolation member coupled to a sensor down into the seal through the open top;
- and
- pressing a collar that surrounds the isolation member down into the housing and into the second cavity.
2 more elements
A method of sealing a sensor to a housing comprising:
- providing a housing with a top and a bottom and a hole that passes through the housing from the top to the bottom wherein the housing further comprises a first cavity that extends down into the housing from the top and surrounds the hole and has a cavity bottom and wherein the housing further comprises a pipe that surrounds the hole and extends up from the cavity bottom into the first cavity and wherein the housing further comprises a second cavity that extends down into the housing from the top and surrounds, and is coaxial with, the first cavity;
- placing a seal with a toroidal shape and an open top down into the bottom of the first cavity wherein the seal surrounds the pipe;
- placing an isolation member coupled to a sensor down into the seal through the open top;
- and
- pressing a collar that surrounds the isolation member down into the housing and into the second cavity.
2 more elements
Dependencies are inferred from the claim text.