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US 2018/0218824 A1Published application
Inductors in beol with particulate magnetic cores
AssigneeInternational Business Machines Corporation
InventorsChandrasekharan Kothandaraman, Eugene J. O'Sullivan, Naigang Wang
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Abstract
An inductor device includes a conductive coil formed within a dielectric material and having a central core area within the coil. Particles are dispersed within the central core region to reduce eddy current loss and increase energy storage. The particles include magnetic properties.
Claims5
A method for forming an inductor device, comprising:
- forming a trench within a central core region of a conductive coil formed within a dielectric material;
- and
- forming a composite region within the trench, the composite region including a polymer matrix having a plurality of particles with magnetic properties dispersed therein with the central core region to reduce eddy current loss and increase energy storage.
Dependencies are inferred from the claim text.