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US 2018/0218823 A1Published application
Inductors in beol with particulate magnetic cores
AssigneeInternational Business Machines Corporation
InventorsChandrasekharan Kothandaraman, Eugene J. O'Sullivan, Naigang Wang
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Abstract
An inductor device includes a conductive coil formed within a dielectric material and having a central core area within the coil. Particles are dispersed within the central core region to reduce eddy current loss and increase energy storage. The particles include magnetic properties.
Claims16
An inductor device, comprising:
- a conductive coil formed within a dielectric material and having a central core area within the coil;
- and
- a plurality of particles dispersed within the central core region to reduce eddy current loss and increase energy storage, the particles including magnetic properties.
An inductor device, comprising:
- a substrate;
- a plurality of layers formed on the substrate;
- a conductive coil formed within the plurality of layers and having a central core area within the coil;
- a trench formed within the central core region;
- and
- a screen-printed composite material including a plurality of particles dispersed within a polymer matrix within the trench in the central core region to reduce eddy current loss and increase energy storage.
3 more elements
-20. (canceled)
Dependencies are inferred from the claim text.