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US 2018/0217566 A1Published application
Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
AssigneeApplied Materials, Inc.
InventorJames MOYNE
Life of this patent
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Abstract
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In some embodiments, a computer implemented method identifies a plurality of predictive algorithms. The method determines when to use one or more of the plurality of predictive algorithms to predict one or more virtual metrology variables in a manufacturing facility.
Claims20
A computer implemented method for predicting product yield, the method comprising:
- identifying, with a multi-algorithm predictive subsystem that is designed to facilitate switching between a plurality of predictive algorithms, the plurality of predictive algorithms including first and second adaptive predictive algorithms to predict product yield in a manufacturing facility;
- identifying a yield threshold that is based on predictions of yield data and actual measurement of yield data to determine when to switch between the first and second adaptive predictive algorithms based on a level of error between predicted yield data and actual measured yield data;
- comparing the yield data predicted with the yield threshold when actual measured yield data for a current prediction cycle is not available;
- and
- invoking, when the actual measured yield data for a current prediction cycle is not available, the first adaptive predictive algorithm if the yield for prediction is less than or approximately equal to the yield threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
2 more elements
A computer-readable non-transitory storage medium comprising executable instructions to cause a processor to perform operations, the instructions comprising:
- identifying, with a multi-algorithm predictive subsystem that is designed to facilitate switching between a plurality of predictive algorithms, the plurality of predictive algorithms including first and second adaptive predictive algorithms to predict product yield in a manufacturing facility;
- identifying a yield threshold that is based on predictions of yield data and actual measurement of yield data to determine when to switch between the first and second adaptive predictive algorithms based on a level of error between predicted yield data and actual measured yield data;
- comparing the yield data predicted with the yield threshold when actual measured yield data for a current prediction cycle is not available;
- and
- invoking, when the actual measured yield data for a current prediction cycle is not available, the first adaptive predictive algorithm if the yield for prediction is less than or approximately equal to the yield threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
2 more elements
A computer system comprising:
- a memory to store a plurality of predictive algorithms;
- and
- at least one processing device, coupled to the memory, that is configured to execute processing logic to:
- identify, with a multi-algorithm predictive subsystem that is designed to facilitate switching between a plurality of predictive algorithms, the plurality of predictive algorithms including first and second adaptive predictive algorithms to predict product yield in a manufacturing facility;
- identify a yield threshold that is based on predictions of yield data and actual measurement of yield data to determine when to switch between the first and second adaptive predictive algorithms based on a level of error between predicted yield data and actual measured yield data;
- compare the yield data predicted with the yield threshold when actual measured yield data for a current prediction cycle is not available;
- and
- invoke, when the actual measured yield data for a current prediction cycle is not available, the first adaptive predictive algorithm if the yield for prediction is less than or approximately equal to the yield threshold to update a prediction equation to adapt to dynamics of the manufacturing facility.
5 more elements
Dependencies are inferred from the claim text.