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US 2018/0215610 A1Published application
Method for manufacturing a device comprising a hermetically sealed vacuum housing and getter
AssigneeUlis
InventorsJérôme Favier, David Bunel
Life of this patent
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Abstract
A device having a microelectronic component housed in a hermetically sealed housing having a vacuum inner space, and including a getter that substantially traps only hydrogen, is inert to oxygen and/or to nitrogen, and is housed in said inner space. Each of the constituent parts of the device being likely to degas into the inner space is a mineral material.
Claims4
A device comprising:
- a housing formed of walls defining a hermetically sealed vacuum inner space;
- a microelectronic component housed in the housing;
- and
- a getter housed in the inner space;
- wherein each constituent of the device likely to degas into the inner space is a mineral material;
- and
- wherein the getter only traps hydrogen.
4 more elements
Dependencies are inferred from the claim text.