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AssigneeAcademy of Opto-Electronics, Chinese Academy of Sciences
InventorsYu WANG, Yi ZHOU, Xingliang SONG, Pengfei SHA, Yuanyuan FAN, Jiangshan ZHAO, Haiyan SHI, Hui LI, Jinbin DING, Yaoying SHAN, Qian WANG, Qianwei CAI, Zhuojun PENG
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The present disclosure provides an excimer laser system. A master oscillator chamber may generate laser pulses with a narrowed line width and a small energy by means of a line width narrowing module, as a seed light. The seed light is refracted by a master oscillator wavefront engineering box and then incident into a power amplifier chamber through a beam splitting system. The beam splitting system, a first high reflectance mirror, a second high reflectance mirror and a third high reflectance mirror may constitute a quadrilateral annular optical path, The power amplifier chamber may have a first pair of Brewster windows and a second pair of Brewster windows, wherein the first pair of Brewster windows is located in a first optical path of the annular optical path along with a discharging electrode of the power amplifier chamber, and the second pair of Brewster windows is located in a second optical path of annular optical path which is parallel to a first amplification optical path. The present disclosure reduces the length of a ring cavity of an excimer laser system with a ring cavity structure, increasing the amplification times and achieving a deeper gain saturation amplification than a traditional structure, thereby improving the output characteristic of the excimer laser system.
An excimer laser system, comprising:
Dependencies are inferred from the claim text.