Back to results
US 2018/0204702 A1Published application
Phosphorus doped diamond electrode with tunable low work function for emitter and collector applications
AssigneeArizona Board of Regents on behalf of Arizona State University
InventorsFranz A. M. Koeck, Robert J. Nemanich
Life of this patent
Estimating the term…
Abstract
An apparatus includes an emitter electrode including a phosphorus doped diamond layer with low work function. The apparatus further includes a collector electrode and a vacuum gap disposed between the emitter and the collector. The collector has a work function of 0.84 eV or less.
Claims11
A method for forming an electrode, comprising:
- loading a substrate into a plasma enhanced chemical vapor deposition (PECVD) reactor and preparing a surface of the substrate for doped diamond growth;
- exposing the substrate to a pure hydrogen plasma for a preset duration;
- and
- depositing a phosphorus doped diamond layer on the substrate to form the electrode,
- wherein the electrode comprises a collector that has a work function of 0.84 eV or less.
2 more elements
The method of claim 17, wherein the preset chamber pressure range comprises a range of 75 to 85 Torr.
Dependencies are inferred from the claim text.