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US 2018/0203139 A1Published application
Graphite sheet for beam sensor, electrode for beam sensor using same, and beam sensor
AssigneeKaneka Corporation
InventorsAtsushi Tatami, Masamitsu Tachibana, Mutsuaki Murakami
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Abstract
An object of the present invention is to provide a graphite sheet for a beam sensor, which is excellent in yield when subjected to laser working. The present invention is a graphite sheet for a beam sensor characterized in that the graphite sheet has no eyeball-shaped convex portions on a surface of its a-b plane.
Claims20
A graphite sheet for a beam sensor, having no eyeball-shaped convex portions on a surface of its a-b plane (sheet plane).
A graphite sheet for a beam sensor, having the variation in film thickness of 20% or less.
Dependencies are inferred from the claim text.