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US 2018/0190470 A1Published application
System and Method for Performing Nano Beam Diffraction Analysis
AssigneeInternational Business Machines Corporation
InventorsMarc Adam BERGENDAHL, James John DEMAREST, Christopher J. PENNY, Roger Allen QUON, Christopher Joseph WASKIEWICZ
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Abstract
A system for performing diffraction analysis, includes a focused ion beam (FIB) device for preparing a sample, a mill for removing a surface portion of the prepared sample, and an analyzer for performing diffraction analysis on the milled sample.
Claims20
A system for performing diffraction analysis, comprising:
- a focused ion beam (FIB) device for removing a sample from a structure;
- a mill for milling the sample to remove a surface portion of the sample;
- and
- an analyzer for performing diffraction analysis on the milled sample.
1 more element
A method of performing diffraction analysis, comprising:
- removing a sample from a structure;
- milling the sample to remove a surface portion of the sample;
- and
- performing diffraction analysis on the milled sample.
1 more element
A method of performing strain analysis, comprising:
- performing a first strain analysis on a sample removed from a strained region of a structure to acquire diffraction data;
- performing a second strain analysis on a reference sample removed from an unstrained region of the structure to acquire reference diffraction data;
- and
- comparing the diffraction data with the reference diffraction data to determine an amount of strain in the sample.
1 more element
Dependencies are inferred from the claim text.