Liquid Dielectric Electrostatic Mems Switch And Method Of Fabrication Thereof
AssigneeKing Abdullah University of Science and Technology
InventorsMohammed Affan Zidan, Jurgen Kosel, Khaled Nabil Salama
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Abstract
A microelectromechanical system (MEMS) switch with liquid dielectric and a method of fabrication thereof are provided. In the context of the MEMS switch, a MEMS switch is provided including a cantilevered source switch, a first actuation gate disposed parallel to the cantilevered source switch, a first drain disposed parallel to a movable end of the cantilevered source switch, and a liquid dielectric disposed within a housing of the microelectromechanical system switch.
Claims20
A microelectromechanical system switch comprising:
- a cantilevered source switch;
- a first actuation gate disposed parallel to the cantilevered source switch;
- a first drain disposed parallel to a movable end of the cantilevered source switch;
- and
- a liquid dielectric disposed within a housing of the microelectromechanical system switch.
A method of fabrication of a microelectromechanical system switch comprising:
- providing a cantilevered source switch;
- providing a first actuation gate disposed parallel to the cantilevered source switch;
- providing a first drain parallel to a movable end of the cantilevered source switch;
- and
- providing a liquid dielectric disposed within a housing of the microelectromechanical system switch.
Dependencies are inferred from the claim text.