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US 2018/0171506 A1Published application
Seed crystal holder, crystal growing device, and crystal growing method
AssigneeKYOCERA Corporation
InventorsKatsuaki MASAKI, Yutaka KUBA, Chiaki DOMOTO, Daisuke UEYAMA, Yuichiro HAYASHI
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Abstract
A seed crystal holder according to the present invention for growing a crystal by a solution method, and that includes a seed crystal made of silicon carbide; a holding member above the seed crystal; a bonding agent configured to fix the seed crystal and the holding member; and a sheet member made of carbon which is interposed in the bonding agent in a thickness direction, and which has an outer periphery smaller than an outer periphery of the seed crystal in a plan view.
Claims14
A seed crystal holder for growing a crystal by a solution method, comprising:
- a seed crystal made of silicon carbide;
- a holding member above the seed crystal;
- a bonding agent configured to fix the seed crystal and the holding member;
- and
- a sheet member made of carbon which is interposed in the bonding agent in a thickness direction,
- wherein the sheet member comprises a through hole in the thickness direction, and an inside of the through hole is filled with a part of the bonding agent.
3 more elements
Dependencies are inferred from the claim text.