Patterned focal plane arrays of carbon nanotube thin film bolometers with high temperature coefficient of resistance and improved detectivity for infrared imaging
AssigneeCarbon Solutions, Inc.
InventorsElena Borisova Bekyarova, Mikhail Efimovich Itkis, Ramesh Palanisamy, Robert Cort Haddon
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Abstract
A method of preparation of focal plane arrays of infrared bolometers includes processing carbon nanotubes to increase a temperature coefficient of resistance (TCR), followed by patterning to form focal plane arrays for infrared imaging.
Claims29
A method of processing carbon nanotubes for application in focal plane arrays for infrared bolometric detectors, comprising a physical processing step and a chemical functionalization step whereby a temperature coefficient of resistance (TCR) for the carbon nanotubes is increased.
A method of processing carbon nanotubes for application in focal plane arrays for infrared bolometric detectors, comprising a physical processing step and an optional chemical functionalization step;
- wherein the physical processing step comprises one or more of an ultrasonication component, a shear mixing component, and an annealing component.
A microbolometer, comprising:
- a substrate;
- an electrode;
- and
- a focal plane array comprising an infrared-sensitive pixel array, the pixel array comprising a single-walled carbon nanotube thin film subjected to one or both of a physical processing step and a chemical functionalization step whereby a temperature coefficient of resistance (TCR) for the carbon nanotubes is increased.
Dependencies are inferred from the claim text.