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AssigneeHitachi High-Technologies Corporation
InventorsHiroshi KOBAYASHI, Akira KARAKAMA, Norio SATO
Estimating the term…
By switching between a plurality of image transfer units based on a state of a stage and using the switched image transfer unit, traceability of stage movement and tolerance to communication failure can be improved. A first image transfer protocol is a protocol of which reliability is higher than reliability of a second image transfer protocol, and a switch unit may select a first image transfer unit in a case where it is determined that a state of a stage is a state in which the stage is stopping. A second image transfer unit is a protocol of which a transfer speed is higher than a transfer speed of the first image transfer protocol, and the switch unit may select the second image transfer unit in a case where it is determined that the state of the stage is a state in which the stage is moving.
A charged particle beam device comprising:
A control method of a charged particle beam device that irradiates a sample on a stage with a charged particle beam, detects charged particles emitted from the sample, and displays an image, the method comprising:
Dependencies are inferred from the claim text.