Oscillating assembly, exhaust system including the same and method of using
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPo-Hsuan HUANG, Tung-Lin YANG
Life of this patent
Estimating the term…
Abstract
An exhaust system includes an inlet configured to receive an exhaust mixture. The exhaust system further includes an exhaust line connected to the inlet. The exhaust system further includes an oscillating assembly connected to the exhaust line. The exhaust system further includes a by-pass line connected to the exhaust line. The exhaust system further includes a feedback path extending from an external gas source to the oscillating assembly, wherein the feedback path is separate from the exhaust line.
Claims20
An exhaust system comprising:
- an inlet configured to receive an exhaust mixture;
- an exhaust line connected to the inlet;
- an oscillating assembly connected to the exhaust line;
- a by-pass line connected to the exhaust line;
- and
- a feedback path extending from an external gas source to the oscillating assembly, wherein the feedback path is separate from the exhaust line.
An oscillating assembly comprising:
- an oscillating element comprising:
- a chamber,
- an inlet configured to receive a gas flow,
- an outlet configured to output the gas flow, and
- a moveable element in the chamber, wherein the moveable element is configured to move based on the gas flow;
- and
- a securing device attached to the oscillating element, wherein the securing device comprises a plurality of contacting points extending from an inner surface.
A method of using an exhaust system, the method comprising:
- activating an oscillating assembly connected to an exhaust line, wherein the oscillating assembly is configured to vibrate the exhaust line;
- measuring a value indicating a flow of particles through the exhaust line;
- comparing the value with a predetermined threshold value;
- and
- increasing a rate of vibration of the exhaust line in response to the value being below the predetermined threshold value.
Dependencies are inferred from the claim text.