Patterned stamp manufacturing method, patterned stamp imprinting method and imprinted article
AssigneeKoninklijke Philips N.V.
InventorsREMCO VAN BRAKEL, MARCUS ANTONIUS VERSCHUUREN, JR.
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Abstract
A method of manufacturing a patterned stamp for patterning a contoured surface is disclosed. The method comprises providing a pliable stamp layer carrying a pattern of features, forcing the pliable stamp layer onto the contoured surface with said pattern of features facing the contoured surface; applying a fluid support layer over the pliable stamp layer on the contoured surface; solidifying the support layer to form the patterned stamp; and removing the patterned stamp from the contoured surface. A corresponding patterned stamp, imprinting method and imprinted article are also disclosed.
Claims5
A patterned stamp for use in imprint lithography, the patterned stamp comprising:
- a rubber body comprising a contoured stamp surface carrying a pattern of relief features, wherein the rubber body includes a support layer and a first layer supported by the support layer, the first layer comprising the contoured stamp surface carrying the pattern of relief features, wherein the support layer is of a different material than the first layer, wherein the first layer is a rubber layer having a first Young's modulus and the support layer is a rubber layer having a second Young's modulus, wherein the first Young's modulus is larger than the second Young's modulus.
An imprint lithography method of forming a patterned contoured surface on a receiving surface, the method comprising:
- providing a pattern precursor layer over the receiving surface;
- imprinting the pattern precursor layer with a patterned stamp, the patterned stamp comprising a rubber body comprising a contoured stamp surface carrying a pattern of relief features, wherein the rubber body includes a support layer and a first layer supported by the support layer, the first layer comprising the contoured stamp surface carrying the pattern of relief features, wherein the support layer is of a different material than the first layer, wherein the first layer is a rubber layer having a first Young's modulus and the support layer is a rubber layer having a second Young's modulus, wherein the first Young's modulus is larger than the second Young's modulus;
- developing the pattern precursor layer into a pattern layer;
- and
- removing the patterned stamp from the developed pattern layer.
An article of manufacture comprising a patterned contoured surface obtainable by:
- providing a pattern precursor layer over the receiving surface;
- imprinting the pattern precursor layer with a patterned stamp, the patterned stamp comprising a rubber body comprising a contoured stamp surface carrying a pattern of relief features, wherein the rubber body includes a support layer and a first layer supported by the support layer, the first layer comprising the contoured stamp surface carrying the pattern of relief features, wherein the support layer is of a different material than the first layer, wherein the first layer is a rubber layer having a first Young's modulus and the support layer is a rubber layer having a second Young's modulus, wherein the first Young's modulus is larger than the second Young's modulus;
- developing the pattern precursor layer into a pattern layer;
- and
- removing the patterned stamp from the developed pattern layer, wherein the patterned contoured surface comprises a pattern of features that continues in a boundary region of at least one contour of the contoured surface.
A use of the patterned stamp for imprint lithography, the patterned stamp comprising a rubber body comprising a contoured stamp surface carrying a pattern of relief features, wherein the rubber body includes a support layer and a first layer supported by the support layer, the first layer comprising the contoured stamp surface carrying the pattern of relief features, wherein the support layer is of a different material than the first layer, wherein the first layer is a rubber layer having a first Young's modulus and the support layer is a rubber layer having a second Young's modulus, wherein the first Young's modulus is larger than the second Young's modulus.
Dependencies are inferred from the claim text.