Cantilever
AssigneesNational University Corporation Nagoya Institute o f Technology, Olympus Corporation
InventorsMasashi KITAZAWA, Michitsugu ARIMA, Masaki TANEMURA
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Abstract
The present invention provides a cantilever for a scanning type probe microscope, the cantilever including a support portion, a lever portion extending from the support portion, a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle, and a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, and a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.
Claims8
A cantilever for a scanning type probe microscope comprising:
- a support portion;
- a lever portion extending from the support portion;
- a protrusion portion formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle;
- and
- a probe in which a fine wire formed at a distal end of the protrusion portion is coated with a functional film, wherein
- a major axis/minor axis ratio of a cross-sectional shape of the probe is smaller than a major axis/minor axis ratio of a cross-sectional shape of the fine wire.
A cantilever for a scanning type probe microscope, comprising:
- a support portion;
- a lever portion extending from the support portion;
- a protrusion portion made of silicon or silicon nitride and formed on a free end side of the lever portion, an apex angle of the protrusion portion being an acute angle;
- and
- a probe in which a fine wire formed at a distal end of the protrusion portion, made of carbon nanofiber or graphite nanofiber, is coated with a functional film which is any one of a conductive film, a magnetic body film and a wear resistance film, wherein
- an apex angle of the protrusion portion is over 15 degrees,
- a major axis/minor axis ratio of a cross-sectional shape of the fine wire is over 3.0, and
- a major axis/minor axis ratio of a cross-sectional shape of the probe is equal to or less than 2.0.
Dependencies are inferred from the claim text.