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AssigneeAixtron SE
InventorsGi Youl Kim, Mark Chen-Lun Lin, Gregory Siu, Ki Chul Park, Jonathan David Mohn, H. William Luca, JR.
Estimating the term…
A measuring device is provided for determining the position of a susceptor in a reactor housing. The measuring device includes a central element, which can be fastened on the susceptor at a predefined location, and a plurality of sensing arms, which protrude from the central element beyond an outer periphery of the susceptor. The sensing arms respectively include a sensing section that can be brought in touching contact with a contact zone. The contact zone is formed by an inner periphery of the reactor housing or a component arranged in the reactor housing. Using the measuring device, the position of a susceptor of a CVD reactor is determined relative to the reactor housing or a component arranged in the reactor housing.
A measuring device for determining a position of a susceptor (3) in a reactor housing (1), the measuring device comprising:
A method for adjusting a position of a susceptor (3) relative to a reactor housing (1) or a component (21) arranged in the reactor housing (1), wherein a flow-through area (10) extends between a gap between an outer periphery (4) of the susceptor (3) and an inner periphery (2) of the reactor housing (1) or the component (21), the gap defined by a gap width (S), the method comprising:
A method for adjusting a position of a susceptor (3) relative to a reactor housing (1) or a component (21) arranged in the reactor housing (1), wherein a flow-through area (10) extends between an outer periphery (4) of the susceptor (3) and an inner periphery (2) of the reactor housing (1) or the component (21), the method comprising:
Dependencies are inferred from the claim text.