Profile measuring apparatus, structure manufacturing system, method for measuring profile, method for manufacturing structure, and non-transitory computer readable medium

A profile measuring apparatus configured to measure a three dimensional profile of an object having a plurality of convex portions and a plurality of concave portions, the apparatus comprising:

• a stage configured to receive the object thereon;
• a detector;
• an irradiator configured to irradiate a linear-shaped measurement light onto an area on a surface of the object;
• an imager configured to obtain an image of the irradiated area;
• a relative-movement section configured to create relative rotational movement between the detector and the stage;
• and
• a controller configured to perform:
• calculating a position of the irradiated area, based on the obtained image;
• and
• controlling the irradiator to tilt a longitudinal direction of the linear-shaped measurement light with respect to both (a) a direction of the relative rotational movement and (b) at least one of a ridge-line direction of the convex portion in the irradiated area and an extending direction of the concave portion in the irradiated area.

A method for measuring a three dimensional profile of an object, comprising;

• preparing a profile measuring apparatus including:
• an irradiator configured to irradiate a linear-shaped measurement light to an area on a surface of the object having a concave-convex shape which is formed repeatedly in a circumferential direction of the object and extends in a direction different from the circumferential direction;
• an imager configured to obtain an image of the irradiated area;
• and
• a controller configured to calculate the profile of the object, based on the obtained image,
• irradiating the measurement light to the surface of the object in a first direction, which is determined corresponding to a normal direction of the surface;
• obtaining the image of the measurement light from a second direction which is determined according to a shape of the concave-convex shape, and
• tilting a longitudinal direction of the linear-shaped measurement light with respect to both (a) a direction of the relative rotational movement and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area

A non-transitory computer readable medium storing a program which allows a computer to execute a method for measuring a three dimensional profile, the computer as a profile measuring apparatus including:

• an irradiator configured to irradiate a linear-shaped measurement light to an area on a surface of an object having a concave-convex shape which is periodically aligned in a circumferential direction of the object and extends in a direction different from the circumferential direction;
• an imager configured to obtain an image of the irradiated area;
• and a controller configured to calculate the profile of the object based on the obtained image, the method comprising:
• irradiating the measurement light to the irradiated area in a first direction, which is determined corresponding to a normal direction of the surface;
• obtaining the image of the measurement light from a second direction which is determined corresponding to a shape of the concave-convex shape in the irradiated area;
• and
• tilting a longitudinal direction of the linear-shaped measurement light with respect to both (a) the circumferential direction of the object and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area

A profile measuring apparatus which measures a three dimensional profile of an object having a concave-convex shape arranged periodically, the apparatus comprising:

• a stage configured to receive the object thereon;
• a light irradiator configured to irradiate a linear-shaped measurement light onto an area of the surface of the object;
• an imager configured to obtain an image of the irradiated area;
• and
• a rotational movement section configured to create relative rotational movement between the stage and the imager;
• wherein the light irradiator is further configured to tilt a longitudinal direction of the linear-shaped measurement light with respect to both (a) a direction of the relative rotational movement and (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area.

A method for measuring a three dimensional profile of an object having at least one of convex or concave portions arranged on a surface of the object and along a circumferential direction of the object, each of the convex or concave portions has an extending direction different from the circumferential direction, and the method being implemented using a profile measurement apparatus including a light irradiator configured to irradiate a linear-shaped measurement light onto an area of the surface of the object;

• an imager configured to obtain an image of the irradiated area;
• a controller configured to calculate the three-dimensional profile of the object based on the image;
• and a relative movement section configured to move the light irradiator relative to the object in a first direction along the circumferential direction;
• the method comprising:
• moving, by the relative movement section, the light irradiator relative to the object such that the measurement light scans the object in the first direction along the circumferential direction;
• tilting a longitudinal direction of the linear-shaped measurement light with respect to both (a) the circumferential direction of the object (b) at least one of a ridge-line direction of a convex portion in the irradiated area and an extending direction of a concave portion in the irradiated area;
• and
• obtaining, by the imager, the image of the irradiated area.