Manufacturing Of Multi-Degree-Of-Freedom Precise Stage Comprising Multi-Materials And Using Three-Dimensional Printer
AssigneeIndustry-University Cooperation Foundation Hanyang University Erica Campus
InventorsDong Hyeok Lee, Nahm Gyoo Cho
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Abstract
Disclosed is a multi-degree-of-freedom precise stage comprising multi-materials and using a three-dimensional printer. A multi-degree-of-freedom precise stage device comprises: a flexure hinge provided as a coupling element between an outer frame and a stage moving part; and a plurality of piezoelectric actuators provided at the outer frame so as to move a stage by the degrees of movement-freedom in multiple directions, and the stage, which has a monolithic structure, is manufactured from at least two materials having different material properties by using the three-dimensional printer.
Claims17
A multi-degree-of-freedom precision stage apparatus, comprising:
- a flexure hinge configured as a coupling element between an external frame and a stage moving part;
- and
- a plurality of piezoelectric actuators disposed in the external frame, for moving the stage with a moving degree of freedom in a plurality of directions,
- wherein the stage of a monolithic structure is fabricated using two or more materials having different physical properties using a 3D printer.
A method of fabricating a multi-degree-of-freedom precision stage, wherein the multi-degree-of-freedom precision stage comprises a flexure hinge configured as a coupling element between an external frame and a stage moving part and a plurality of piezoelectric actuators disposed in the external frame, for moving the stage with a moving degree of freedom in a plurality of directions, and
- the method of fabricating the multi-degree-of-freedom precision stage comprises fabricating the stage of a monolithic structure using a multi-material output by a 3D printer by controlling the 3D printer outputting two or more different materials based on a 3D design for the multi-degree-of-freedom precision stage.
Dependencies are inferred from the claim text.