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US 2018/0124534 A1Published application
Method for testing signal-to-noise ratio using a film frame
AssigneeRobert Bosch GmbH
InventorsAndrew J. Doller, David Pravlik
Life of this patent
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Abstract
A system and a method are provided for testing a MEMS microphone during manufacture by using a film to obstruct the acoustic ports of the microphone. The microphone testing is performed while the microphones are still in an array and mounted on a film frame. By performing the testing while the acoustic ports of the microphone are covered with film, unwanted, external noise is attenuated.
Claims18
A method of testing a microelectromechanical system (MEMS) microphone, the method comprising:
- covering an acoustic port of a MEMS microphone with a film;
- connecting a contact pad of the MEMS microphone to a control unit;
- measuring, with the control unit, an output signal from the MEMS microphone while the acoustic port is covered with the film to obtain noise performance data;
- and
- recording, with the control unit, the noise performance data.
2 more elements
A system for testing noise of a microelectromechanical (MEMS) microphone comprising:
- a film configured to attenuate sound and debris input into an acoustic port of the MEMS microphone;
- a testing apparatus configured to connect to a contact pad on the MEMS microphone;
- and
- a control unit configured to measure an output signal from the MEMS microphone to obtain noise performance data while acoustic input to the acoustic port is attenuated by the film.
1 more element
Dependencies are inferred from the claim text.